Noncontact Manipulation of Objects Using Magnets

非接触式操纵技术由于其工作空间小，在微机械应用中尤为重要。本研究旨在开发磁悬浮小物体在较大空间中运动的机构、控制和测量方法。首先，本文提出了一种新的小磁体在二维垂直空间中悬浮运动的磁悬浮机构。该机构由两个电磁铁、一个用于重力补偿的永磁体和一个磁轭组成。连接两个电磁铁的共用极板对于在大范围内产生强大的垂直力是必不可少的。小磁铁的水平和垂直位置分别由两个电磁铁电流的比率和总和确定。其次，将上述原理推广到三维情况。一个由四个电磁铁组成的原型，一个Perma…构造了更多的重力补偿磁铁和磁轭。对几种类型的磁极进行了实验测试，并对其设计条件进行了研究。第三，研究了一种非磁性金属的悬浮运动机理。众所周知，交变磁场对非磁性金属产生排斥力。通过搭建试验台验证了该方法的可行性，并研究了该方法的设计条件。最后，以激光传感器为实验对象，研究了超声波传感器在磁悬浮测量中的应用。超声波传感器性价比高，适用于人体内等复杂环境的测量。然而，由于分辨率较低，它们从未在磁悬浮中使用过。实验结果表明，卡尔曼滤波使超声波传感器磁悬浮成为可能，为微小物体的磁悬浮运动奠定了基础。这项研究的结果将扩展到具有多个机械部件的微型机械。较少

Noncontact manipulation technologies are important especially in micromachine applications because of their small working spaces. This research aims at development of mechanism, control andmeasurement for magnetically levitated movement of small objects in a larger space compared with an object sizeFirst, we propose a new magnetic mechanism for levitated movement of a small magnet in a 2 dimensional vertical space. This mechanism consists of two electromagnets, a permanent magnet for gravity compensation and a yoke. A common polepiece connecting two electromagnets is essential for producing strong vertical forces in a wide range. Horizontal and vertical positions of the small magnet are determined by the ratio and the sum of the two electromagnet currents, respectively. A prototype is constructed and used to verify the effectiveness of the mechanism expermentally.Second, the above principle is extended to a 3 dimensional case. A prototype, which consists of four electromagnets, a perma … More nent magnet for gravity compensation and a yoke, is constructed. Several types of polepiece are tested experimentally and its design conditions are investigated.Third, a mechanism for levitated movement of a nonmagnetic metal is considered. It is known that an alternating magnetic field produces a repulsive force to nonmagnetic metals. The possibility of the use of this method is tested by constructing a testbed and its design conditions are investigated.Finally, the use of ultrasonic sensors for measurement in magnetic levitation is investigated, while laser sensors are used in the experiments above. Ultrasonic sensors are cost effective and useful for measurement in complicated environments such as inside human bodies. However, they have never been used in magnetic levitation because of their low resolution. It is show nexperimentally that magnetic levitation with ultrasonic sensors is made possible by Kalman filters.In conclusion, basic technologies for magnetically levitated movement of small objects are established. The result of this research will be extended to micromachines with several machine parts. Less