The effect of elastic deformation and dimensional errors of a magnification lever on the displacement characteristics of the parallel spring for positioning

1944年，通过理论、有限元分析和实验，进行了以下工作：1）尺寸误差对动平台直线运动的影响。2）整体式XYZ工作台的设计与制造。1.尺寸误差对动平台直线运动的影响。60的宽度和6毫米的厚度，我们研究的尺寸误差和杠杆比的误差对移动平台的直线运动的影响。研究表明：（1）随着厚度尺寸误差的增大，动平台沿顺时针方向下降，反之亦然。(2)单位竖向位移的斜率不随荷载值的变化而变化。（3）运动的不对称性造成了移动台的倾斜。2.整体式XYZ工作台的设计与制造我们用线切割机从铝板上切割出一个整体式XYZ工作台，高度为40 × 40 × 40 mm，深度为100 mm。每个工作台的最大行程预计将达到20 μ m。研究结果表明：1）单块XYZ工作台的设计和制造具有很高的可能性; 2）三个轴的位移干涉小于3- 4%。

The followings are conduced through the theory, FEM anlysis and experiment in 1944.1) The effect of the dimensional error on the liner motion of the movable stage.2) Design and manufacture of the one-piece XYZ table.1.The effect of the dimensional error on the linear motion of the movable stageManufacturing a parallel spring movement with the magnifying lever made of alminume, 80 in length, 60 in width and 6 mm in thickness, we investigate the effect of the dimensional error and the error of the lever ratio on the linear motion of the movable stage. The facts made clear in study are ;(1) The movable stage declines clockwise with increase of dimensional error in the thickness, vice versa.(2) The slope per unit vertical displacement remains unchanged regadless of the load value.(3)The asymmetry of the movement creates the inclination on the movalble stage.2.Design and manufacture of the one-piece XYZ tableUsing the wire cutter we made an one-piece XYZ table cut from an alminum plate, measuring 40*40*40 mm in heigt, withand depth, respectively. The maximum travel of the each table is expected to reach 20 mum. The table is activated by PZT.The results obtained in the study are ;1) High possibility of design and manufacture of a prominent one-pice XYZ table2) The interference of the displacement in each of three axis is confiremed to be less than around 3-4%。