Development of One-piece XY Table with Two Step Magnifying Lever and Extremely Low Interference Ratio

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This research is much concerned with the stage for fine positioning.The conditions under which the design of the mechanism are determined as follows ;1)Independent motion : Although the motion of the table is theoretically independent of the direction of x and y, the interferential motions between both axes are brought in owing to the error of manufacturing.2)One-piece structure : High repeatability of motion is essential.3)Displacement magnifying lever : The output of PZT-actuator is in general very small, then, the mechanical lever for magnifying such a small output is necessary. By using it, around 200〜300 [μzm] travel of the table is realized.The characteristics of the table are studied theoretically, experimentally and by FEM and their results are compared with each others. Main results are : Magnification efficiency Actuation in y direction FEM/Experimental→around 30%, Theoretical 60% Actuation in z direction FEM/Experimental/Theoretical→around 90%(Dlnterferential ratio Actuation in y direction : 2.3% (in x direction), 4.7%(in z) Actuation in z directioni 8.2% (in x), 9.7%(in y)