Cluster tool for local material growth (of nano to millimeter structures applying laser irradiation and reactive gas)

用于局部材料生长的集群工具（应用激光照射和反应气体的纳米到毫米结构）

• 批准号: 439445370
• 金额: --
• 依托单位: Arbeitsgruppe Experimentelle Physik
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2020
• 资助国家: 德国
• 起止时间: 2019-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/439445370?language=en
• 关键词: Cluster; tool; local; material; growth

The proposed instrument serves for the fabrication of nano to millimeter structures, i.e. for local material growth, whereby the processes partially run laser-assisted and/or in reactive gas atmosphere. Given its combined functionalities, the instrument can be named “cluster-tool of the next generation” and as such take a leading role for future technologies. Whereas in a classical cluster tool vacuum chambers with different sputter targets or evaporation sources are joined, the new system counts on the combination of inkjet printing with laser-assisted processes for additive and subtractive manufacturing. The laser-assisted processes comprise multiphoton polymerization for smallest structures as well as laser ablation and laser transformation additionally on a larger scale. A special feature is the possibility of laser processing in a reaction chamber, which allows the usage of reactive gases for material transformation and synthesis. This process can be conducted at slightly reduced pressure, whereas generally the cluster tool of the next generation runs at ambient atmosphere, allowing cost-effective fabrication. By combining the different processes, finally complete devices can be grown in a single system. In the course of this, structural and opto-electronic investigations using Raman and time-resolved photoluminescence measurements take place in between the different process steps, so to say in-line. Starting point for the application of the proposed instrument is the field of renewable energies, in particular photovoltaics, with the aim of maximizing energy conversion with a minimum amount of material usage. With respect to efficient energy conversion, nano to millimeter-sized structures are chosen for tailoring light guidance and charge carrier extraction via their optical and electrical characteristics. Ultrathin solar cells with integrated photonic nanostructures and micrometer-sized solar cells for operation under light concentration are two specific examples. Further possible applications in the field of energy conversion comprise e.g. the topics of solar fuels or thermoelectrics. Here, not only the opto-electronic functionalities of the nano to millimeter structures contribute, but also an accessible extended material space: the Chalcogenide material system constitutes the starting point with a broad potential for further development with respect to band gap variations but also in the direction of 2D materials. On the other hand, 3D nanostructures offer functionalities in other areas like phononic and piezoelectric materials. Via the multiple processes available in the cluster tool of the next generation a variety of structures becomes accessible which allows research on current relevant topics.

所提出的仪器用于制造纳米到毫米结构，即用于局部材料生长，其中该过程部分地在激光辅助下和/或在反应气体气氛中运行。鉴于其综合功能，该工具可被称为“下一代集群工具”，并因此在未来技术中发挥主导作用。在传统的集群工具中，真空室与不同的溅射靶或蒸发源相连，而新系统则将喷墨打印与激光辅助工艺相结合，用于增材和减材制造。激光辅助工艺包括用于最小结构的多光子聚合以及激光烧蚀和激光转化。其特点是可以在反应室中进行激光加工，从而可以使用反应气体进行材料转化和合成。该过程可以在略微降低的压力下进行，而下一代的群集工具通常在环境大气下运行，从而允许具有成本效益的制造。通过结合不同的工艺，最终可以在单个系统中生长完整的器件。在此过程中，使用拉曼和时间分辨光致发光测量的结构和光电研究在不同的工艺步骤之间进行，也就是说在线进行。所提议的仪器的应用起点是可再生能源领域，特别是光化学领域，目的是以最少的材料使用量最大限度地提高能量转换。关于有效的能量转换，纳米至毫米尺寸的结构被选择用于通过其光学和电学特性来定制光导和电荷载流子提取。具有集成光子纳米结构的超薄太阳能电池和用于在光聚集下操作的微米尺寸的太阳能电池是两个具体的示例。在能量转换领域中的其他可能的应用包括例如太阳能燃料或热电的主题。在这里，不仅纳米到毫米结构的光电功能做出了贡献，而且还提供了可访问的扩展材料空间：硫属化物材料系统构成了具有广泛潜力的起点，可以在带隙变化方面以及在2D材料方向上进一步发展。另一方面，3D纳米结构在其他领域提供功能，如声子和压电材料。通过下一代集群工具中的多个进程，可以访问各种结构，从而可以对当前相关主题进行研究。