Al concentration dependent oxidation behavior of Ti1-yAlyB2 and Ti1-xAlxN coatings

点击翻译按钮获取中文摘要

We have demonstrated the synthesis for single phase V1-xAlxN coatings with unprecedented Al concentrations of up to x = 0.75. This supersaturation was obtained by separating the film-forming species in time and energy domains through synchronization of the pulsed substrate bias with intense periodic fluxes of energetic Al ions during reactive hybrid high power pulsed magnetron sputtering. Here, we will utilize massive Al ion fluxes [*] for the first time during synthesis of Ti1-xAlxN and Ti1-yAlyB2 coatings with maximized Al concentrations (ymax , xmax) following the subplantation approach conceived by G. Greczynski and the applicant. In addition to the two films with maximized Al concentration, also films with a 5 at.% and 10 at.% lower Al concentration than the respective maximum concentration will be grown and evaluated for both material systems. The oxidation behavior of all six compositions will be evaluated at temperatures of up to 1000 °C and exposure times of up to 60 min in a furnace and by differential scanning calorimetry. [*] Massive ion fluxes are enabled by recent developments in power supply design allowing for 1000 A max current compared to the previously employed 500 A maximum current rating.