Al concentration dependent oxidation behavior of Ti1-yAlyB2 and Ti1-xAlxN coatings

我们已经证明了单相V1-xAlxN涂层的合成，其Al含量达到了前所未有的x=0.75。在反应混合高功率脉冲磁控溅射过程中，通过脉冲衬底偏压与高能铝离子的强周期通量的同步，使成膜物种在时间域和能量域分离，获得了这种过饱和。在这里，我们将第一次在合成Ti1-xAlxN和Ti1-yAlyB2涂层的过程中使用大量的铝离子助熔剂[*]，根据G.Greczynski和申请人的亚植入法合成具有最大Al浓度(ymax，xmax)的Ti1-xAlxN和Ti1-yAlyB2涂层。除了具有最大铝浓度的两种薄膜外，还将生长铝浓度低于各自最大浓度的5at.%和10at.%的薄膜，并对这两种材料系统进行评估。所有六种成分的氧化行为将在温度高达1000°C和炉中暴露时间长达60分钟的情况下进行评估，并通过差示扫描量热仪进行评估。[*]电源设计的最新发展使得大量离子通量得以实现，允许的最大电流为1000安，而以前采用的最大额定电流为500安。

We have demonstrated the synthesis for single phase V1-xAlxN coatings with unprecedented Al concentrations of up to x = 0.75. This supersaturation was obtained by separating the film-forming species in time and energy domains through synchronization of the pulsed substrate bias with intense periodic fluxes of energetic Al ions during reactive hybrid high power pulsed magnetron sputtering. Here, we will utilize massive Al ion fluxes [*] for the first time during synthesis of Ti1-xAlxN and Ti1-yAlyB2 coatings with maximized Al concentrations (ymax , xmax) following the subplantation approach conceived by G. Greczynski and the applicant. In addition to the two films with maximized Al concentration, also films with a 5 at.% and 10 at.% lower Al concentration than the respective maximum concentration will be grown and evaluated for both material systems. The oxidation behavior of all six compositions will be evaluated at temperatures of up to 1000 °C and exposure times of up to 60 min in a furnace and by differential scanning calorimetry. [*] Massive ion fluxes are enabled by recent developments in power supply design allowing for 1000 A max current compared to the previously employed 500 A maximum current rating.