Development of Microwave Atomic Force Microscope and Quantitative Evaluation of Electrical Properties in Nano-Area

微波原子力显微镜的研制及纳米区域电学性能的定量评价

• 批准号: 17206011
• 负责人: YANG Ju
• 金额: $ 31.45万
• 依托单位: Nagoya University (2007)Tohoku University (2005-2006)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2005
• 资助国家: 日本
• 起止时间: 2005 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-17206011/
• 关键词: Microwave; Atomic Force; Microscope; Nono-area; Electrical Property; Quantitative Evaluation; AFM Probe; Surface Topography; 原子間力顕微鏡; 電気特性; 導電率; 近接場計測; 表面計測

To satisfy the requirement of the development of nano-technology, a microwave atomic force microscope which can measure the electrical properties of nano-materials and nano-devices in nano-meter scale was developed. By establishing a new system combined with the microwave and atomic force microscope techniques, the capability to measure the surface topography and the electrical properties of materials simultaneously was realized. The obtained results are as follows.1.Design of microwave AFM probeBy analyzing the propagation of microwave in the probe, and the shape and dimensions of AFM probe, a waveguide which can propagate microwave in the probe effectively was designed. The most suitable structure of the microwave AFM probe was determined.2.Fabrication of GaAs AFM probeTo restrain the attenuation of microwave propagating in the probe, GaAs wafer was used as the substrate of the probe. Using wet etching technique, GaAs AFM probe having a desired structure was fabricated successfully.3.Completion of microwave AFM probeA waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. The open structure of the waveguide at the tip of the probe was obtained by using FIB fabrication. A microwave AFM probe was formed successfully.4.Construction of microwave atomic force microscopeThe developed microwave AFM probe, atomic force microscope, and network analyzer were combined, and a new microwave atomic force microscope which can simultaneously measure the surface topography and the electrical properties of materials was realized.5.Quantitative evaluation of electrical properties of materialsBy using silicon wafer samples having different electrical conductivities, quantitative evaluation model was built up from the relationship between the response of microwave and the conductivity of the samples. A quantitative method to evaluate the electrical properties of materials in small area was realized.

为了满足纳米技术发展的需要，研制了一种能够在纳米尺度上测量纳米材料和纳米器件电学性能的微波原子力显微镜。通过建立一种微波与原子力显微镜技术相结合的新系统，实现了对材料表面形貌和电学性能的同时测量。主要研究结果如下：1.微波原子力显微镜探针的设计通过分析微波在探针中的传播规律，以及原子力显微镜探针的形状和尺寸，设计了一种能有效传播微波的波导。2. GaAs原子力显微镜探针的制作为了抑制微波在探针中传播的衰减，采用GaAs晶片作为探针的衬底。微波AFM探针的制作通过在GaAs原子力显微镜探针的上下表面蒸镀Au薄膜，引入了波导结构。探针尖端的波导开口结构是通过FIB工艺实现的。4.微波原子力显微镜的构建将所研制的微波原子力显微镜探针、原子力显微镜和网络分析仪相结合，5.材料电学性能的定量评价电导率，根据微波响应与样品电导率之间的关系，建立了定量评价模型。实现了一种在小区域内对材料电性能进行定量评价的方法。

项目成果

Development of a Nanostructural Microwave Probe Based on GaAs

基于砷化镓的纳米结构微波探针的研制

• 发表时间: 2008
• 期刊: Microsystem Technologies 14(印刷中)
• 作者: Y. Ju(T. Kobayashi;et. al.)
• 通讯作者: et. al.)

Development of a Nanostructual Microwave Probe Besed on GaAs

基于砷化镓的纳米结构微波探针的研制

• 发表时间: 2008
• 期刊: Microsystem Technologies 14(印刷中)
• 作者: Y. Ju (T. Kobayashi;et. al.)
• 通讯作者: et. al.)

Vibrational Dynamics of Concentrated-Mass Cantilevers in Atomic Force Acoustic Microscopy: Presence of Modes with Selective Enhancement of Vertical or Lateral Tip Motion

原子力声学显微镜中集中质量悬臂的振动动力学：选择性增强垂直或横向尖端运动的模式的存在

• 发表时间: 2007
• 期刊: Journal of Physics: Conference Series 61
• 作者: G. Song(Y. Ju;et. al.);M. Muraoka
• 通讯作者: M. Muraoka

Quantitative Measurement of Submicron Electrical Conductivity

亚微米电导率的定量测量

• 发表时间: 2007
• 期刊: Journal of Physics D: Applied Physics 40
• 作者: K. Sasagawa(N. Yamaji;S. Fukushi);K. Sasagawa(S. Fukushi);B. -F. Ju (Y. Ju and M. Saka)
• 通讯作者: B. -F. Ju (Y. Ju and M. Saka)

Video Enhanced Depth-Sensing Indentation Technique for Characterizing Mechanical Behaviors of Biomaterials

用于表征生物材料机械行为的视频增强深度传感压痕技术

• 发表时间: 2006
• 期刊: Measurevent Science and Technology 17
• 作者: Y.Ju (T.Kobayashi;H.Soyama);B. -F. Ju (Y. Ju and M. Saka);B. -F. Ju (Y. Ju and M. Saka);B.-F. Ju(Y. Ju and M. Saka)
• 通讯作者: B.-F. Ju(Y. Ju and M. Saka)