Concept and Development of The Optically Driven Nanomechatronics

我们提出并发展了“光驱动纳米机电一体化”，它只使用光能来驱动微/纳米机器。由于这一概念与传统的微/纳米致动器完全不同，我们从基础开始，最终完成了世界上第一个激光捕获驱动的微型机器人原型系统。1）“光驱动纳米机电一体化“概念在传统的微/纳米机器研究中，机械部件和电气引线都应该小型化。相反，光学驱动的微/纳机器只需要机械部件就可以实现小型化。机械部件由透明材料制成，并通过激光捕获技术从远处驱动。微纳机器本身没有电引线，因此，微纳机器变得更容易制造，并且在设计上具有更大的灵活性。此外，微/纳米机器可以在空气和液体中工作，用于生物制品， ...更多信息 2）制作方法我们采用本课题组自主研发的“双光子高速微立体光刻”技术制作了分辨率为100 nm的微纳机器。为了保证微纳机械在液体中的平稳操作，我们采用生物涂层的方法来防止机械部件之间的粘附。在薄玻璃基片上成功地制作了几种长度为5-10μm的多自由度微操作器。3）验证微操作器在水中成功地用频率大于10 Hz的红外激光驱动。4）遥控系统一个具有三个自由度的微操作器--夹持、旋转和平移，通过倒置显微镜观察操纵器时，用最初开发的类似于摇杆的控制器进行远程控制。在水溶液中成功实现了单细胞操纵和细胞弹性测量，奠定了“光驱动纳米机电一体化”的基础，并展示了其在生物和非生物领域的广泛应用潜力。少

We have proposed and developed "Optically driven nanomechatronics", which uses only optical energy to drive micro/nano machines. As the concept is totally different from conventional micro/nano actuators, we have started from the basics, and finally completed a prototype system of the world's first micro-robot driven by laser trapping in water.1) Concept of "Optically driven nanomechatronics"In conventional researches of micro/nano machines, both the mechanical components and the electrical lead wires should be miniaturized. On the contrary, optically driven micro/nano machines need only mechanical components to be miniaturized. The mechanical components are made of transparent materials, and driven by laser trapping technique from a distance. The micro/nano machine itself has no electrical lead wires in it. Therefore, the micro/nano machine becomes easier to be fabricated, and has more flexibility in design. Moreover, the micro/nano machine can work both in air and in liquid for biolo … More gical applications.2) Fabrication MethodWe have fabricated the micro/nano machines with 100nm resolution using "2-photon high-speed micro stereo-lithography" originally developed in our group. For the smooth manipulation of the micro/nano machines in liquid, we applied biological coating method to prevent adhesion between mechanical components. Several types of micro manipulators 5-10μm in length with multi degrees of freedom were successfully fabricated on a thin glass substrate.3) VerificationThe micro manipulators were successfully actuated with IR laser at more than 10Hz in water.4) Remote Control SystemA micro manipulator with 3 degrees of freedom-grip, rotation and translation, was remotely controlled with an originally developed joystick-like controller while observing the manipulator through an inverted microscope. Single cell manipulation and the measurement of cell elasticity were successfully achieved in water solution.In this project, we have established the basics of "optically driven nanomechatronics", and demonstrated its wide potential for applications in both biological and non-biological fields. Less