Preparation of Oxide Mesocrystal Films and Their Application to Transparent Conducting Films

在这项研究中，我们的目标是用一种新的薄膜处理技术来低温制备金属氧化物晶体薄膜，以取代锡掺杂的氧化铟，从而实现低环境负荷、高沉积速率和低成本。采用旋转喷雾法制备了可见光透过率大于70%、电阻率约为5×10~(-3)欧姆cm的氧化锌薄膜。当以水溶性聚合物为添加剂时，柠檬酸三钠以不同的方式改变了晶形。与柠檬酸三钠法制备的氧化锌薄膜相比，用水溶性聚合物制备的氧化锌薄膜的性能没有明显的提高。结果表明，吸附有机物和薄膜结构对电学性能有很大影响。

In this research, we aim low-temperature fabrication of metal oxide crystal films for substitution of tin-doped indium oxide by a new film processing technique which can achieve low environmental load, high deposition rate, and cost effectiveness. ZnO films with visible-light transparency over 70 percents and electrical resistivity about 5X10-3 ohm cm were successfully fabricated by spin-spray method with controlling the flow rate of solution and rotation rate of table. When water-soluble polymer was used as an additive, the crystal shape was changed by different manner with trisodium citrate. The performance of ZnO films prepared by using water-soluble polymer was not improved compared with those prepared with trisodium citrate. The results indicated that the adsorbed organics and film structure strongly affected electrical properties.