Development and Application of the Three Dimensional Microscope System for Nano Space Spectroscopy

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In order to achieve three-dimensional chemical analyses at submicrometer spatial resolution, a new confocal Raman/fluorescent microscope coupled with close loop piezoelectric actuators for XY scanning of a sample stage and Z scanning of an objective has been developed. The closed loop operation based on reference signals from position sensors attached to the actuators provides good linearity, long time stability and high accuracy of sample displacement. Scattered light or emission from the sample is collected using the objective, and guided to a pinhole and a slit of spectrometer. Performance of this system within XY plane was checked using fluorescent microspheres and phototaic crystals made of silicon. A fluorescence image of two 200 nm spheres aggregating on a quartz glass shows that tops of both spheres are clearly resolved. Furthermore, a Raman image of the photonic crystal collected in the 500 cm-1 band of silicon shows the submicormeter holes arranged triangularly.As mentioned above, the microscope system has been developed successfully.