Research on monolithic integrated-optic devices using grating components and quantum-well lasers

对各种采用光栅元件和量子阱激光器的单片集成光学器件进行了器件设计、理论分析和实验工作。所得结果总结如下：1对集成光栅元件进行了理论分析，建立了设计技术建立了一种由有源脊通道和弯曲光栅组成的分布式布拉格反射激光器作为集成激光振荡器的设计技术用于集成的锥形功率放大器的理论分析。通过基于波束传播法的动态波前分析，阐明了优化设计和理论性能提出并制作了一种利用弯曲深沟槽布拉格反射器的高斯模激光振荡器。在10mA阈值下完成激光发射提出并制作了一种用于垂直球波发射的带有光栅耦合器的分布式布拉格反射激光器。演示了连续波2.2mW球波发射的运行情况设计并制作了一种由分布式布拉格反射激光振荡器、带式功率放大器和光栅耦合器组成的大功率准直激光器。单模振荡稳定，衍射限制准直，耦合功率高达183mW提出并制作了一种集成无透镜外腔可调谐半导体激光器。连续波输出功率为84mW，光束衍射受限，调谐范围为21.5nm研究了量子壁选择性失序技术，以降低无源波导损耗。提出了一种采用双层SiO_2薄膜快速热退火的方法，并取得了显著的降低损耗的效果将上述技术应用于分布式布拉格反射激光器。实现了显著的阈值降低（3.5mA）、输出功率提高（60mW）和侧模抑制比。

Device proposal, theoretical analysis and experimental work were performed on various monolithic integrated optic devices using grating components and quantum-well lasers. The obtained results are summarized as follows.1 Theoretical analysis of grating components for integration was performed to establish the design technology.2 Design technology was established on a distributed Bragg reflector Laser consisting of a active ridge channel and curved gratings as an laser oscillator for integration.3 Theoretical analysis of tapered power amplifier for intgegration. Optimum design and theoretical performances ware clarified through dynamic wavefront analysis based on the beam propagation method.4 A Gaussian-mode laser oscillator using curved deep-groove Bragg reflector was proposed and fabricated. Lasing at 10mA threshold was accomplished.5 A distributed Bragg reflector laser with grating coupler for vertical spherical-wave emission was proposed and fabricated. Operation of CW 2.2mW spherical wave emission was demonstrated.6 An integrated high-power laser emitting a collimated beam consisting of a distributed Bragg reflector laser oscillator, a taped power amplifier and a grating coupler was designed and fabricated. Stable single-mode oscillation, diffraction-limited collimation and coupled power as high as 183mW were demonstrated.7 An integrated lensless external-cavity tunable semiconductor laser was proposed and fabricated. CW 84mW output power, diffraction-limited beam and 21.5nm tuning range were accomplished.8 Selective disordering of quantum wall was studied as a technique to reduce passive waveguide losses. A method using bithickness SiO_2 film and rapid thermal annealing was developed, and remarkable loss reduction was accomplished.9 The above technique was applied to a distributed Bragg reflector laser. Remarkable threshold reduction (3.5mA), output power enhancement (60mW) and side mode suppression ratio were accomplished.