Surface improvement ofsoft mechanisms by fabricating micro structures

在橡胶等软材料制成的软机械上制造尺寸从亚毫米到几微米的微结构，实现了各种功能物理性能。围绕这一点，我们开展了对柔性机构进行功能表面改进的研究。(1)光学特性方面：制作间距为1~2微米的栅格，可以用彩色分布图像直观地掌握机器人的运动和应力。(2)亲水/拒水性能：将微结构应用于微机器人手指表面，实现了微部件的稳定操控。(3)微吸杯：具有各向异性吸力和纹理表面吸力等多种性能的集成式微吸杯。

Fabricating micro structures ranging in size sub mm to several micro meters on soft mechanisms made of soft materials such as rubber realizes various functional physical properties. Focusing on this point we have made researches on giving functional surface improvements on soft mechanisms.(1) On optical properties: fabricating gratings with 1 to 2micron meter pitch enables grasping motion and stress of robots visually with color distribution images. (2) On hydrophilic/water-repellent properties: applying micro structures on the surface of micro robot fingers realizes very stable handling of micro parts. (3) On micro suction cups: integrated micro suction cups with various properties such as anisotropic sucking force and sucking on textured surfaces.