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Preparation of Transparent, Tick Films by the Sol-Gel Method and Their Application to Micro-Pattrening

溶胶-凝胶法制备透明粘性薄膜及其在微图案化中的应用

基本信息

批准号：
11555239
负责人：
MINAMI Tsutomu
金额：
$ 3.52万
依托单位：
Osaka Prefecture University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B).
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

项目摘要

1. transparent, thick films have been successfully prepared using benzyltriethoxysilane-derived particles in the electrophoretic sol-gel deposition and the successive heat treatment. In addition, photo-polymerizable inorganic-organic hybrid films and the inorganic-organic hybrid films with high refractive indexes have been synthesized for their application to photolithographic and embossing micro-patterning, respectively.2. The thickness of the methylsilsequioxane-phenylsilsesquioxane films which can be formed on the substrates without cracking was maximized at around the mole ratio of methy group : phenyl group=1 : 1. The optimum film hardness and the adequate timing for emboss micro-patterning were clarified. The refractive index of the phenylsilsesquioxane and benzylsilsesquioxane films increased with increasing the amount of titania added.3. Optical waveguides have been photolithographically fabricated on glass substrates using vinyltrimethoxysilane-derived inorganic-organic hybrid films. Micro-lens arrays have been newly formed on hydrophobic-hydrophilic patterned substrates based on the difference in the surface free energy and fuluidity of the phenylsilsesquioxane and benzylsilsesquioxane at temperatures higher than their glass transition temperatures.4. The shapes of the fabricated optical waveguides and micro-lens arrays were evaluated using SEM, AFM and 3D-surface profilometer. Fabricated micro-lens arrays showed good focusing properties.

1.在电泳溶胶-凝胶沉积和后续热处理中使用苄基三乙氧基硅烷衍生的颗粒已经成功地制备了透明的厚膜。此外，还合成了可光聚合的无机-有机杂化薄膜和高折射率的无机-有机杂化薄膜，分别用于微图案化和微图案化.甲基倍半硅氧烷-苯基倍半硅氧烷膜的厚度在甲基：苯基的摩尔比约为1：1时最大化，该膜可在基板上形成而不开裂。阐明了最佳膜层硬度和适当的微图形化时间。苯基倍半硅氧烷和苄基倍半硅氧烷薄膜的折射率随着二氧化钛添加量的增加而增加.利用乙烯基三甲氧基硅烷衍生的无机-有机杂化薄膜在玻璃基片上制备了光波导。基于苯基倍半硅氧烷和苄基倍半硅氧烷在高于其玻璃化转变温度的温度下的表面自由能和荧光度的差异，在疏水-亲水图案化基底上新形成了微透镜阵列.利用扫描电镜、原子力显微镜和三维表面轮廓仪对制作的光波导和微透镜阵列的形状进行了评价。制作的微透镜阵列具有良好的聚焦性能。