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Development of Total-Reflection Angle Soft X-ray Spectroscopy combined with RHEED

全反射角软X射线能谱结合RHEED的研制

基本信息

批准号：
11559002
负责人：
TAKAMI Tomohide
金额：
$ 8.77万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B).
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11559002/
关键词：
RHEED Soft X-ray spectroscopy Total-reflection angle Surface analysis

项目摘要

Ino, one of the investigators on this project, discovered that an X-ray resonance line emitted from a metal thin film with only a layer, at the total-reflection angle, can be detected on observing the pattern of reflection high-energy electron diffraction (RHEED). He named the new surface analysis method "RHEED - Total-Reflection Angle X-ray Spectroscopy (RHEED-TRAXS)". The RHEED-TRAXS is a powerful method to observe RHEED pattern and to analyze the stoichiometry of the surface simultaneously. Moreover, it is a useful method to analyze the depth profile of thin films by changing the incident angle of the electron and the extraction angle of the X-ray. The purpose of this project is to develop the RHEED-TRAXS at the soft X-ray region, i.e., "RHEED - Total-Reflection Angle Soft X-ray Spectroscopy (RHEED-TRASXS)", to show the usefulness of this method for chemical analysis of surface, and to suggest the practical use of RHEED-TRASXS.In 1999, We produced a prototype soft X-ray spectrometer in our machine shop. In this spectrometer, aberration-corrected concave grating with curved and variable spacing grooves was used to split the fluorescent X-ray lines. The splitted X-rays were detected by a multi-channel plate to change the X-ray signal into the visible light. The visible light was detected by a CCD camera out of the vacuum chamber through a viewing port. On the prototype spectrometer system, however, the signal was to weak to detect. Therefore, we planned to make an improved spectrometer to put a CCD camera into the vacuum, detecting the X-rays by the CCD camera directly.In 2000, We bought the CCD camera available to put in vacuum. We produced the modified spectrometer, using the CCD camera in vacuum, also in our machine shop. The modification brought us better S/N ratios of the spectrum. However, bremsstrahlung was overlapped with the spectrum. To conquer the bremsstrahlung will enable us to put the RHEED-TRASXS to practical use.

Ino是该项目的研究人员之一，他发现从只有一层的金属薄膜中以全反射角发射的X射线共振线可以通过观察反射高能电子衍射（RHEED）的图案来检测。他将这种新的表面分析方法命名为“RHEED -全反射角X射线光谱法（RHEED-TRAXS）”。RAHEED-TRAXS是同时观察RHEED图和分析表面化学计量的有力手段。此外，通过改变电子的入射角和X射线的引出角来分析薄膜的深度分布是一种有用的方法。本项目的目的是研制软X射线区域的RHEED-TRAXS，“RHEED -全反射角软X射线光谱法（RHEED-TRASXS）"，以显示该方法在表面化学分析中的有用性，并建议RHEED-TRASXS的实际应用。该谱仪采用具有弯曲变间距凹槽的像差校正凹面光栅对X射线荧光谱线进行分束。分裂后的X射线被多通道板探测，将X射线信号转换为可见光。可见光由CCD相机通过观察口从真空室中检测。然而，在原型光谱仪系统上，信号太弱而无法检测到。为此，我们计划做一个改进的光谱仪，把一个CCD摄像机放在真空中，直接用CCD摄像机检测X射线。我们也在我们的机械车间生产了改进的光谱仪，在真空中使用CCD相机。改进后的谱图具有更好的信噪比。然而，韧致辐射与光谱重叠。克服韧致辐射将使我们能够将RHEED-TRASXS投入实际应用。