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Development of Nano-mechatronics for ultra-high density data storage devices

超高密度数据存储设备纳米机电一体化的发展

基本信息

批准号：
12450105
负责人：
TAGAWA Norio
金额：
$ 8.38万
依托单位：
Kansai University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450105/
关键词：
ultra-high density data storage micromachine nano-mechatronics multi-layered composite PZT thin film active sliders ICP-RIE deep etching nano-tribology ultra-thin liquid lubricant films 近接記録機構マイクロトラッキング機構高アスペクト比ディープエッチング ICP-RIE法 /

项目摘要

In order to achieve more than 100 Gb/in^2 area recording density, the important fundamental technologies, which are evolutionary and necessary to develop novel head positioning actuator mechanisms based on nano-mechatronics have been studied for 3 years and completed successfully. The obtained research results are summarized as follows ;(1)Novel MEMS-based head positioning actuator mechanisms, which operate in not only lateral but also vertical directions independently at nm accuracy, were designed from the static and dynamic characteristics points of view, using FEM. The features are that the dimensions for the proposed mechanism is about 200μm×80μm and actuated by PZT thin films in two directions.(2)The important fundamental technologies are developed in order to achieve the novel head positioning actuator mechanisms. Those are total micro-machining process technologies and improved deep etching technologies to fabricate high aspect-ratio structures. We also develop the novel multi-l … More ayered composite PZT thin films, which is confirmed to have the very good piezoelectric properties.(3)MEMS-based active sliders with microactuators are proposed. The active sliders that we proposed use PZT thin films as a micro-actuator and control the slider flying height of less than 10 nm. This design concept is quite different from that for conventional passive air bearing technology, The micro-machining process for the active slider is also developed. We can confirm the feasibility of realizing the novel active pacing control technology.(4)The effects of ultra-thin liquid lubricant films on slider dynamics has been studied experimentally, in order to investigate the feasibility of realizing less than 10 nm head/disk interface (HDI). It was found that the periodic lubricant non-uniform redistribution caused by the slider-lubricant interactions was occurred and we studied the HDI design instructions from nano-technology point of view.(5)Spreading characteristics of novel cyclotriphosphazene-terminated pertluoropolyether films on carbon surfaces were investigated by using a scanning micro-ellipsometer. It was found that the mobility of novel lubricant is lower than that of conventional Zdol and the end groups affect the monolayer film thickness and the existing conformation of novel lubricant films on carbon surfaces cuold be estimated. Less

为了实现100 Gb/in2以上的面记录密度，研制基于纳米机电一体化的新型磁头定位驱动器机构所需要的重要基础技术已经研究了3年，并取得了成功。主要研究成果如下：(1)采用有限元方法，从静态和动态特性的角度出发，设计了一种新型的MEMS磁头定位驱动器机构，该驱动器不仅可以在横向和垂直方向上以纳米级的精度独立工作。其特点是，该机构的尺寸约为200μm×80μm，由PZT薄膜双向驱动。(2)为实现新型磁头定位驱动器机构，开展了重要的基础技术研究。这些都是用于制造高深宽比结构的全微加工技术和改进的深刻蚀技术。我们还开发了新颖的多L…层状复合PZT薄膜具有很好的压电性能。(3)提出了基于MEMS微致动器的主动滑块。我们提出的主动滑块采用PZT薄膜作为微驱动器，控制滑块的飞行高度小于10 nm。这种设计理念与传统的被动空气轴承技术有很大的不同，还开发了主动滑块的微加工工艺。通过实验研究了超薄液体润滑膜对滑块动力学的影响，探讨了实现小于10 nm的磁头/磁盘接口的可行性。发现由于滑块与润滑剂的相互作用导致了润滑剂周期性的不均匀再分布，并从纳米技术的角度研究了HDI设计指南。(5)利用扫描微椭圆偏振仪研究了新型环三磷腈封端的全氟聚醚薄膜在碳表面的铺展特性。结果表明，新型润滑剂的迁移率低于传统的Zdol润滑剂，端基对单层膜厚度有影响，可以预测新型润滑剂在碳表面的存在构象。较少