Development of Highly Precise Micro Wall Sensor and Its Advanced Evaluation System

高精度微壁传感器及其先进评估系统的研制

• 批准号: 12555051
• 负责人: HONAM Shinji
• 金额: $ 6.66万
• 依托单位: Tokyo University of Science
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12555051/
• 关键词: Micro Flow; Wall Sensor; Computational Fluid Mechanics; Micro Sensing Wind Tunnel; Micro PIV; Evaluation System; センサー; マイクロ風洞; マイクロセンサ; マイクロ粒子画像流速計; 低レイノルズ数流れ

The general goal of the present research project is to develop the advanced evaluation system in the micro sensing wind tunnel as well as the precise wall flow sensor. We obtained the advanced evaluation system of the micro devices. The micro sensing wind tunnel was constructed to clarify performance of the micro devices by using the micro Particle Image Velocimetry system. We also designed a new type of the micro flow sensor which can detect the wall shear stress and the flow direction in order to improve the time response of the sensor. In the new type of the micro sensor configuration, the two sensing elements are arrayed on the silicon chip and also used as heater due to a self-heating of the elements for higher frequency response and miniaturization. The flow sensing elements are thermal sensitive thin film resistors fabricated on the silicon chip. The principle of the micro flow sensor is based on the convective heat transfer from the heated resistance elements to the surrounding fluid flow. The optimum configuration of the sensor was decided by the numerical simulation of a two-dimensional low Reynolds number flow including the heat conduction within the chip base. The proposed micro flow sensor with 30% reduction in size is found to have higher sensitivity in the feasibility study. As a result, the present system can be employed in the engineering application as the effective design and check system for the micro devices in the low-Reynolds number flow

本课题的总体目标是研制先进的微传感风洞评价系统和高精度的壁面流传感器。获得了先进的微器件性能评价体系。利用微粒子图像测速系统搭建了微传感风洞，对微器件的性能进行了研究。为了提高微流量传感器的时间响应特性，我们还设计了一种新型的微流量传感器，它可以同时检测壁面切应力和流动方向。在这种新型的微传感器结构中，两个传感元件被排列在硅芯片上，并且由于元件的自加热而被用作加热器，以获得更高的频率响应和小型化。流量传感元件是制作在硅芯片上的热敏薄膜电阻。微流量传感器的原理是基于从加热的电阻元件到周围流体流的对流热传递。通过对考虑芯片内部热传导的二维低雷诺数流动的数值模拟，确定了传感器的最佳结构。在可行性研究中发现，所提出的微型流量传感器的尺寸减小了30%，具有更高的灵敏度。该系统可作为低雷诺数流动条件下微型器件的有效设计和校核系统，应用于工程实际

项目成果

森岡禎, 本阿弥眞治: "渦発生ジェットによる後方ステップ流れの制御-再付着領域壁面近傍流れの動的特性"日本機械学会論文集B編. 69巻680号. 7 (2003)

Tadashi Morioka、Shinji Honami：“通过涡流生成射流控制后退流动 - 再附着区域壁附近流动的动态特性”日本机械工程学会会刊，第 B 卷，第 69 卷，第 680 期。 7 (2003)

Masato Takai, Takashi Ogawa, Shinji Honami: "The Reattachment Process in Low Reynolds Number Flow Over a Backward-Facing Step"Proc 9th Int Symp on Transport Phenomena. No.143. 6 (2002)

Masato Takai、Takashi Okawa、Shinji Honami：“向后台阶上低雷诺数流动的重新附着过程”Proc 9th Int Symp on Transport Pphenomena。

森岡禎, 本阿弥眞治: "渦発生ジェットによる後方ステップ流れの閉ループ制御"日本機械学会論文集B編. 67巻656号. 876-881 (2001)

Yoshi Morioka，Shinji Honami：“使用涡流生成射流的向后步进流的闭环控制”，日本机械工程师学会汇刊，B 版，第 67 卷，第 656 期。876-881 (2001)。

Shinji HONAMI: "A Backward Facing Step Flow and Its Control"Proc Fifth JSME/KSME Fluid Engineering Conference Pre-Symposium. 15-22 (2002)

Shinji HONAMI：“向后的阶梯流及其控制”Proc 第五届 JSME/KSME 流体工程会议预研讨会。

Shinji HONAMI: "A Backward Facing Step Flow and Its Control"Proc Fifth JSME/KSME Fluid Engineering Conference Pre-Symposium(招待講演). 15-22 (2002)

Shinji HONAMI：“向后的阶梯流及其控制”Proc 第五届 JSME/KSME 流体工程会议预研讨会（邀请演讲）15-22（2002 年）。