Development of wavelength-independent back-illuminated CCD detector and its application

波长无关背照式CCD探测器的研制及其应用

• 批准号: 12558051
• 负责人: MORITA Shigeru
• 金额: $ 6.91万
• 依托单位: National Institute for Fusion Science
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12558051/
• 关键词: CCD detector; Visible spectroscopy; VUV spectroscopy; X-ray spectroscopy; Plasma diagnostics; Spectrometer; プラズマ分光

During past 4 years we experimentally verified many advantages on back-illuminated CCD detector, which was used in visible, vacuum ultraviolet (VUV) and x-ray plasma spectroscopy. The CCD detector was being operated without any technical trouble through this research. As a most important result it was concluded that no limit on the measurement existed for such variations of spectroscopy. Excellent characteristics of the CCD detector on the stability of sensitivity and the spatial-and time-resolution, which were examined in this research, can be applicable to another field of scientific research.In the visible region, the characteristics of the back-illuminated CCD were compared with photodiode array (PDA) with image intensifier (II) used for the visible spectroscopy. The characteristics of the CCD was much superior to the PDA+II in many terms of sudden detector destruction due to strong visible light input, sensitivity change over long period, spectral profile shape at foot position, s … More patial resolution, dynamic range for signal detection, time resolution, operational stability, S/N ratio etc.In the VUV region, the characteristics of the back-illuminated CCD were compared with PDA with micro-channel plate (MCP). The detectors were installed on a 20cm normal incidence spectrometer and checked using CHS and LHD plasma light. The result was the same as the visible case. The CCD detector had much better quality. Especially, the CCD did not show, any damage to increase of the vacuum pressure of the spectrometer, although the operation of M C P was very sensitive to the pressure increase and the CCD was easily damaged by the pressure increase. In addition, the use of CCD as a detector of VUV spectrometer enabled us a very easy setting and adjustment of the grating because we could exactly monitor the focus image at the detector plane using 0th-order (visible) light.In the x-ray region, the characteristics of the CCD detector were compared with usually used multiwire proportional counter (MWPC ). In x-ray emissions. from plasmas the intensity is a large function of electron temperature. Then, the x-ray intensity largely changes during a discharge and is easily enhanced by an additional heating. As a result, the x-ray spectroscopy was limited by the detector signal dynamic range. The use of the CCD detector instead of the MWPC increased the detector dynamic range by 1000 times. Until now the ion temperature measurement by the x-ray spectroscopy included a considerably large error bar. However, we could completely resolve the problem using the CCD detector. Less

在过去的四年中，我们在实验中验证了反向释放的CCD检测器的许多优势，后者用于可见的，真空紫外线（VUV）和X射线等离子体光谱。通过这项研究，CCD检测器正在运行，没有任何技术麻烦。作为最重要的结果，可以得出结论，对于这种光谱的变化，没有对测量的限制。在这项研究中检查了CCD检测器对敏感性和空间分辨率的稳定性的良好特征，可以适用于另一个科学研究领域。在可见的区域，将后刷的CCD的特征与光电数阵列（PDA）的特征与图像增强器（II）用于访问范围。在许多方面，CCD的特征在许多方面都优于PDA+II II，这是由于强大的可见光输入，长时间的敏感性变化，脚部位置的敏感性变化，脚部位置的光谱形状，S…………更专性分辨率，信号检测的动态范围，时间识别，时间分辨率，操作稳定性，S/n比，vuv s/n比与PD的特征，以及pd cc的特征。 （MCP）。将探测器安装在20厘米的正常入射光谱仪上，并使用CHS和LHD等离子光检查。结果与可见的情况相同。 CCD检测器的质量要好得多。特别是，CCD没有显示出对光谱仪的真空压力增加的任何损害，尽管M C P的操作非常敏感，并且CCD很容易因压力增加而损坏。此外，将CCD用作VUV光谱仪的检测器，使我们对光栅进行了非常简单的设置和调整，因为我们可以使用0th阶（可见）光（可见）光线在X射线区域中准确监视探测器平面的焦点图像，在X射线区域中，将CCD检测器的特性与通常使用的多电视成分计数（MWPC）进行了比较。在X射线排放中。从等离子体中，强度是电子温度的很大功能。然后，X射线强度在放电期间很大变化，并通过额外的加热很容易增强。结果，X射线光谱受检测器信号动态范围的限制。 CCD检测器而不是MWPC的使用增加了检测器动态范围1000倍。到目前为止，X射线光谱的离子温度测量包括一个小心的误差线。但是，我们可以使用CCD检测器完全解决问题。较少的

项目成果

Shigeru MORITA: "Effect of carbon divertor Plates on impurities, Zeff and density limit in large helical device"Physica Scripta. T91. 48-52 (2001)

Shigeru MORITA：“碳偏滤器板对大型螺旋装置中的杂质、Zeff 和密度限制的影响”Physica Scripta。

Sadatsugu MUTO: "First from x-ray pulse height analyzer with radial scanning system for LHD"Peview of Scientific Instruments. 72. 1206-1209 (2001)

Sadatsugu MUTO：“第一个来自 X 射线脉冲高度分析仪的 LHD 径向扫描系统”科学仪器综述。

S.Morita, M.Goto et al.: "Experimental study on ion temperature behaviours in ECH, ICRF and NBI H2, He and Ne discharges of the Large Helical Device"Nuclear Fusion. Vol.43. 899-909 (2003)

S.Morita、M.Goto 等人：“大型螺旋装置的 ECH、ICRF 和 NBI H2、He 和 Ne 放电中离子温度行为的实验研究”核聚变。

S.Morita, M.Goto, et al.: "Experimental study on ion temperature behaviours in ECH,ICRF and NBI H2,He and Ne discharges of the Large Helical Device"Nuclear Fusion. Vol.43. 899-909 (2003)

S.Morita、M.Goto 等人：“大型螺旋装置”核聚变的 ECH、ICRF 和 NBI H2、He 和 Ne 放电中离子温度行为的实验研究。

S.Morita, M.Goto: "Space resolved VUV spectroscopy using the 3m normal incidence spectrometer with back-illuminated CCD detector in the LHD"Review of Scientific Instruments. Vol.74. 2036-2039 (2003)

S.Morita、M.Goto：“使用 LHD 中配备背照式 CCD 探测器的 3m 正入射光谱仪进行空间分辨 VUV 光谱”科学仪器评论。