Development of wavelength-independent back-illuminated CCD detector and its application

波长无关背照式CCD探测器的研制及其应用

• 批准号: 12558051
• 负责人: MORITA Shigeru
• 金额: $ 6.91万
• 依托单位: National Institute for Fusion Science
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12558051/
• 关键词: CCD detector; Visible spectroscopy; VUV spectroscopy; X-ray spectroscopy; Plasma diagnostics; Spectrometer; プラズマ分光

During past 4 years we experimentally verified many advantages on back-illuminated CCD detector, which was used in visible, vacuum ultraviolet (VUV) and x-ray plasma spectroscopy. The CCD detector was being operated without any technical trouble through this research. As a most important result it was concluded that no limit on the measurement existed for such variations of spectroscopy. Excellent characteristics of the CCD detector on the stability of sensitivity and the spatial-and time-resolution, which were examined in this research, can be applicable to another field of scientific research.In the visible region, the characteristics of the back-illuminated CCD were compared with photodiode array (PDA) with image intensifier (II) used for the visible spectroscopy. The characteristics of the CCD was much superior to the PDA+II in many terms of sudden detector destruction due to strong visible light input, sensitivity change over long period, spectral profile shape at foot position, s … More patial resolution, dynamic range for signal detection, time resolution, operational stability, S/N ratio etc.In the VUV region, the characteristics of the back-illuminated CCD were compared with PDA with micro-channel plate (MCP). The detectors were installed on a 20cm normal incidence spectrometer and checked using CHS and LHD plasma light. The result was the same as the visible case. The CCD detector had much better quality. Especially, the CCD did not show, any damage to increase of the vacuum pressure of the spectrometer, although the operation of M C P was very sensitive to the pressure increase and the CCD was easily damaged by the pressure increase. In addition, the use of CCD as a detector of VUV spectrometer enabled us a very easy setting and adjustment of the grating because we could exactly monitor the focus image at the detector plane using 0th-order (visible) light.In the x-ray region, the characteristics of the CCD detector were compared with usually used multiwire proportional counter (MWPC ). In x-ray emissions. from plasmas the intensity is a large function of electron temperature. Then, the x-ray intensity largely changes during a discharge and is easily enhanced by an additional heating. As a result, the x-ray spectroscopy was limited by the detector signal dynamic range. The use of the CCD detector instead of the MWPC increased the detector dynamic range by 1000 times. Until now the ion temperature measurement by the x-ray spectroscopy included a considerably large error bar. However, we could completely resolve the problem using the CCD detector. Less

在过去的四年中，我们通过实验验证了背照式CCD探测器在可见光、真空紫外（VUV）和X射线等离子体光谱中的许多优点。通过本研究，CCD检测器的操作没有任何技术故障。作为一个最重要的结果，得出的结论是，没有限制的测量存在这种变化的光谱。本研究考察了CCD探测器在灵敏度稳定性、空间和时间分辨率等方面的优异特性，可应用于另一个科学研究领域。在可见光区，将背照式CCD的特性与用于可见光谱的带图像增强器（II）的光电二极管阵列（PDA）进行了比较。CCD的特性在许多方面都优于PDA+II的上级，如由于强可见光输入引起的探测器突然损坏、长时间的灵敏度变化、脚部位置的光谱轮廓形状、 ...更多信息 在真空紫外波段，比较了背照式CCD与带微通道板（MCP）的PDA在空间分辨率、信号检测动态范围、时间分辨率、工作稳定性、信噪比等方面的性能。探测器安装在20cm正入射光谱仪上，并使用CHS和LHD等离子体光进行检查。结果与可见病例相同。CCD探测器有更好的质量。特别是，尽管M C P的操作对压力增加非常敏感并且CCD容易被压力增加损坏，但是CCD没有显示出对光谱仪真空压力增加的任何损坏。此外，由于采用CCD作为真空紫外光谱仪的探测器，可以利用0阶（可见）光精确地监测探测器平面上的焦像，因此，光栅的设置和调节非常容易。在X射线辐射中。从等离子体来看，强度是电子温度的大函数。然后，X射线强度在放电期间发生很大变化，并且很容易通过额外的加热来增强。因此，X射线光谱法受到检测器信号动态范围的限制。使用CCD探测器代替MWPC，使探测器的动态范围增加了1000倍。到目前为止，通过X射线光谱法进行的离子温度测量包括相当大的误差条。然而，我们可以使用CCD探测器完全解决这个问题。少

项目成果

S.Morita, M.Goto et al.: "Experimental study on ion temperature behaviours in ECH, ICRF and NBI H2, He and Ne discharges of the Large Helical Device"Nuclear Fusion. Vol.43. 899-909 (2003)

S.Morita、M.Goto 等人：“大型螺旋装置的 ECH、ICRF 和 NBI H2、He 和 Ne 放电中离子温度行为的实验研究”核聚变。

Shigeru MORITA: "Effect of carbon divertor Plates on impurities, Zeff and density limit in large helical device"Physica Scripta. T91. 48-52 (2001)

Shigeru MORITA：“碳偏滤器板对大型螺旋装置中的杂质、Zeff 和密度限制的影响”Physica Scripta。

Sadatsugu MUTO: "First from x-ray pulse height analyzer with radial scanning system for LHD"Peview of Scientific Instruments. 72. 1206-1209 (2001)

Sadatsugu MUTO：“第一个来自 X 射线脉冲高度分析仪的 LHD 径向扫描系统”科学仪器综述。

S.Morita, M.Goto, et al.: "Experimental study on ion temperature behaviours in ECH,ICRF and NBI H2,He and Ne discharges of the Large Helical Device"Nuclear Fusion. Vol.43. 899-909 (2003)

S.Morita、M.Goto 等人：“大型螺旋装置”核聚变的 ECH、ICRF 和 NBI H2、He 和 Ne 放电中离子温度行为的实验研究。

S.Morita, M.Goto: "Space resolved VUV spectroscopy using the 3m normal incidence spectrometer with back-illuminated CCD detector in the LHD"Review of Scientific Instruments. Vol.74. 2036-2039 (2003)

S.Morita、M.Goto：“使用 LHD 中配备背照式 CCD 探测器的 3m 正入射光谱仪进行空间分辨 VUV 光谱”科学仪器评论。