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Spatial coherence synthesis imaging

空间相干合成成像

基本信息

批准号：
13450028
负责人：
TAKAKI Yasuhiro
金额：
$ 9.41万
依托单位：
Tokyo University of Agriculture & Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

项目摘要

The theory of spatial coherence synthesis imaging and the fabrication technique of diffractive optical elements having nano-structure are studied.The Fourier iterative algorithm was developed for the design of mask patterns which generate super-resolution patterns. The Fourier iterative algorithm was applied between the pupil plane and the image plane. The contrast of the super-resolution pattern became sufficiently high with about 100 iterations.There is the tradeoff between the arbitrary pattern generation and the high contrast image generation. In order to overcome this problem, the line width of the super-resolution patterns is limited to λ/4 NA. This enables to limit the spatial frequency components of the super-resolution patterns around the highest spatial frequencies so that the contrast becomes higher.The pattern contrast was more improved by limiting the pattern orientations to one direction. The two-dimensional line patterns are divided into horizontal lines and horizontal lines. The optimization is performed independently for both directional lines. Two super-resolution images, which consist of lines having different directions, are double-exposed to generate arbitrary two-dimensional super-resolution patterns.The optical characteristics of optical elements having nano-structure can be calculated by use of the vector diffraction theories, not by the conventional scalar diffraction theories. We introduced rigorous coupled-wave analysis for the vector diffraction calculation. We examined the optical characteristics with this theory and determined the spatial period and the aspect ratio of the optical elements.A new nano-structure fabrication technique was proposed, which uses several spatial shifts of a one-dimensional fine pattern to produce a much finer pattern. This technique offers the higher throughput and the higher pattern accuracy than the conventional emboss technique which is now used for the mass production.

研究了空间相干合成成像理论和纳米结构衍射光学元件的制作技术，提出了利用傅里叶迭代算法设计超分辨掩模图形的方法。在光瞳面和像面之间采用傅里叶迭代算法。经过约100次迭代，超分辨率图案的对比度变得足够高。在任意图案生成和高对比度图像生成之间存在折衷。为了克服这个问题，超分辨率图案的线宽被限制为λ/4 NA。这使得能够将超分辨率图案的空间频率分量限制在最高空间频率附近，使得对比度变得更高。通过将图案取向限制在一个方向上，图案对比度得到进一步改善。二维线图案被分为水平线和水平线。对于两条方向线独立地执行优化。通过对两幅由不同方向的直线组成的超分辨像进行二次曝光，得到任意二维超分辨图形，利用矢量衍射理论计算纳米结构光学元件的光学特性，而不是传统的标量衍射理论。我们引入了严格的耦合波分析的矢量衍射计算。利用该理论研究了纳米结构的光学特性，确定了光学元件的空间周期和纵横比，提出了一种新的纳米结构制作技术，该技术利用一维精细图案的多次空间位移来制作更精细的图案。该技术提供了比现在用于大规模生产的常规光刻技术更高的生产量和更高的图案精度。