Development of Scanning Thermal Microscope with Microscale Quantitative Temperature Measurement Function.

具有微尺度定量测温功能的扫描热显微镜的研制。

• 批准号: 13555051
• 负责人: NAKABEPPU Osamu
• 金额: $ 4.74万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555051/
• 关键词: AFM; SThM; Microscale; MEMS; Temperature Measurement; Feed Back; 微細センサー

Scanning Thermal Microscope (SThM) provides topological and thermal images by a temperature sensing cantilever probe. Usually, the SThM passively measures temperature or thermal properties by detecting thermal information through a contact point on a sample and converting it with a calibration curve. However, the passive method can't take quantitative temperature image because measured values are influenced by various factors such as surface temperature, thermal properties, unevenness of sample surface, adsorption layer, and so on. Therefore, we have developed a novel active method for quantitative temperature imaging regardless of variations in thermal conductance at the contact point. In the active method, a thermal feedback control step maintains the cantilever at the same temperature as the sample surface by detecting heat flow along the cantilever and feeding power proportional to it to the cantilever, then cantilever temperature is measured by another sensor on it. We experimentally examined the active method by producing multi-function cantilevers with a heat flow sensor, electric heater and a temperature sensor and a feedback circuit. The active system demonstrated good performance in real temperature measurement regardless of thermal

扫描热显微镜(SthM)通过温度传感悬臂梁探头提供拓扑和热图像。通常，SthM通过样品上的接触点检测热信息，并将其转换为校准曲线，从而被动地测量温度或热性能。但由于受表面温度、热物性、样品表面不平整度、吸附层等多种因素的影响，被动法不能获得定量的温度图像。因此，我们开发了一种新的主动温度成像方法，无论接触点热导的变化如何，都可以进行定量温度成像。在主动方法中，热反馈控制步骤通过检测沿悬臂梁的热流并向悬臂梁提供与其成比例的功率来保持悬臂梁与样品表面相同的温度，然后由其上的另一个传感器测量悬臂梁的温度。我们用热流传感器、电加热器、温度传感器和反馈电路制作了多功能悬臂梁，对主动方法进行了实验验证。该主动系统在实际温度测量中表现出了良好的性能。

项目成果

Osamu Nakabeppu, Takamitsu Suzuki: "Development of Scanning Thermal Microscopy for Nano-scale Real Temperaure Measurement"Heat Transfer 2002,Proceedings of the Twelfth International Heat Transfer Conference. 1. 447-452 (2002)

Osamu Nakabeppu、Takamitsu Suzuki：“用于纳米级真实温度测量的扫描热显微镜的发展”传热 2002，第十二届国际传热会议论文集。

Osamu Nakabeppu, Takamitsu Suzuki: "Microscale temperature measurement by scanning thermal microscopy"J. Thermal Analysis and Calorimetry. 69. 727-737 (2002)

Osamu Nakabeppu、Takamitsu Suzuki：“通过扫描热显微镜测量微尺度温度”J。

Osamu Nakabeppu, Takamitsu Suzuki, Takayoshi Inoue: "Development of real temperature measurement system on SThM"Proc. 39^<th> National Heat Transfer Conference in Japan. 2. 387-388 (2002)

Osamu Nakabeppu、Takamitsu Suzuki、Takayoshi Inoue：“SThM 上真实温度测量系统的开发”Proc。

Osamu Nakabeppu, Takamitsu Suzuki: "Active and Passive Thermal Imaging in Scanning Thermal Microscopy"Proc. 6th ASME-JSME Thermal Engineering Joint Conference(CD-ROM). Al-304. (2003)

Osamu Nakabeppu、Takamitsu Suzuki：“扫描热显微镜中的主动和被动热成像”Proc。

Osamu Nakabeppu, Takamitsu Suzuki: "Microscale temperature measurement by scanning thermal microscopy"J.Thermal Analysis and Calorimetry. 169. 727-737 (2002)

Osamu Nakabeppu、Takamitsu Suzuki：“通过扫描热显微镜进行微尺度温度测量”J.热分析与量热法。