Development of Scanning Thermal Microscope with Microscale Quantitative Temperature Measurement Function.

扫描热显微镜（SThM）通过温度传感悬臂探头提供拓扑和热图像。通常，SThM通过样品上的接触点检测热信息并将其与校准曲线转换，从而被动地测量温度或热性能。然而，由于测量值受到表面温度、热性质、样品表面不均匀度、吸附层等多种因素的影响，被动方法无法获得定量的温度图像。因此，我们开发了一种新的主动方法，用于定量温度成像，而不考虑接触点的热导率变化。在主动方法中，热反馈控制步骤通过检测沿悬臂梁的热流并将与之成比例的功率馈送到悬臂梁上，使悬臂梁保持与样品表面相同的温度，然后由悬臂梁上的另一个传感器测量悬臂梁的温度。我们通过实验验证了主动方法，通过热流传感器、电加热器、温度传感器和反馈电路制造多功能悬臂梁。该有源系统在实际温度测量中表现出良好的性能

Scanning Thermal Microscope (SThM) provides topological and thermal images by a temperature sensing cantilever probe. Usually, the SThM passively measures temperature or thermal properties by detecting thermal information through a contact point on a sample and converting it with a calibration curve. However, the passive method can't take quantitative temperature image because measured values are influenced by various factors such as surface temperature, thermal properties, unevenness of sample surface, adsorption layer, and so on. Therefore, we have developed a novel active method for quantitative temperature imaging regardless of variations in thermal conductance at the contact point. In the active method, a thermal feedback control step maintains the cantilever at the same temperature as the sample surface by detecting heat flow along the cantilever and feeding power proportional to it to the cantilever, then cantilever temperature is measured by another sensor on it. We experimentally examined the active method by producing multi-function cantilevers with a heat flow sensor, electric heater and a temperature sensor and a feedback circuit. The active system demonstrated good performance in real temperature measurement regardless of thermal