Development of a wearable gyro-sensor using high-power femtosecond laser

使用高功率飞秒激光器开发可穿戴陀螺仪传感器

• 批准号: 13555196
• 负责人: KONDO Ken-ichi
• 金额: $ 6.34万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555196/
• 关键词: ultrashort pulsed laser; femtosecond; laser processing; quartz; gyro-sensor; ablation; threshold; フェムト秒レーザー; 誘電破壊; 石英; センサー; 光通信; 微細加工; 衝撃波

Laser-matter interaction has various mechanisms, which involved both physical and chemical processes, depending on laser intensity and a pulse width. Laser is now used for precise material processing in order to make optical devices. In this research, we performed precise laser processing of a quartz sample, which is a base material of the double T-type gyro-sensor, using a femtosecond laser beam. We also studied the mechanism of laser processing at intensity around 10 J/cm^2 and a pulse width of 80 fs and ablation threshold of the quartz. The femtosecond laser used wad a table-top tera-watt (T^3) laser system, which is base on a Ti : sapphire laser and a chirp pulse amplification. The amplified 300-ps laser beam (wavelength of 800 nm) was compressed to 80 fs by using a pair of gratings. Using the 80 fs laser pulse, both the surface processing and the cutting of the quartz were examined. A threshold intensity of laser ablation for the surface processing was obtained to be 8.6 J/cb^2. In order to cut the quartz plate (300-・m thick), energy of 670・J was required. The laser cutting of the quartz plate was demonstrated by using a 1kHz femtosecond laser system.

激光-物质相互作用有多种机制，包括物理和化学过程，取决于激光强度和脉冲宽度。激光现在被用于精密材料加工，以制造光学设备。在本研究中，我们使用飞秒激光光束对双T型陀螺传感器的基材--石英样品进行了精密激光加工。研究了激光强度约为10J/cm~2、脉宽为80ps、烧蚀阈值为石英的激光加工机理。飞秒激光使用的是台式太瓦(T^3)激光系统，该系统基于钛宝石激光器和啁啾脉冲放大。利用一对光栅将放大后的300ps激光(波长为800 nm)压缩到80ps。利用80ps激光脉冲，对石英的表面加工和切割进行了研究。表面处理的激光烧蚀阈值强度为8.6J/cb^2。要切割300-·m厚的石英板，需要670·J的能量。利用1 kHz飞秒激光系统演示了石英板的激光切割。