Development of a wearable gyro-sensor using high-power femtosecond laser

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Laser-matter interaction has various mechanisms, which involved both physical and chemical processes, depending on laser intensity and a pulse width. Laser is now used for precise material processing in order to make optical devices. In this research, we performed precise laser processing of a quartz sample, which is a base material of the double T-type gyro-sensor, using a femtosecond laser beam. We also studied the mechanism of laser processing at intensity around 10 J/cm^2 and a pulse width of 80 fs and ablation threshold of the quartz. The femtosecond laser used wad a table-top tera-watt (T^3) laser system, which is base on a Ti : sapphire laser and a chirp pulse amplification. The amplified 300-ps laser beam (wavelength of 800 nm) was compressed to 80 fs by using a pair of gratings. Using the 80 fs laser pulse, both the surface processing and the cutting of the quartz were examined. A threshold intensity of laser ablation for the surface processing was obtained to be 8.6 J/cb^2. In order to cut the quartz plate (300-・m thick), energy of 670・J was required. The laser cutting of the quartz plate was demonstrated by using a 1kHz femtosecond laser system.