Development of four component optical interference micro accelerometer for dowohole seismic measurement

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(a)Design of interference-type accelerometers: The frequency characteristics and sensitivity of the accelerometers were re-investigated and dimensions of the parts were decided.(b)Fabrication: We have designed a process chart for the microsensor and fabricated the sensor using facilities for micromechanical systems equiooed in VBL, Tohoku University. Morn than 10 sensors with expected interference pattern were fabricated.(c)Evaluation of the microsensors: The interference pattern, static characteristic and dynamic characteristics of the microsensors were evaluated in Lab. Then the sensors were mounted onto a metal-mount for 4C detector. Its static characteristics was investigated.(d)Field test: The 4C detector was set at the bottom of borehole in test site on campus. Artificial seismic signals from downhole airgun was detected by the 4C detector, and its in-situ performance was evaluated.