Development of four component optical interference micro accelerometer for dowohole seismic measurement

井孔地震测量四分量光学干涉微加速度计的研制

• 批准号: 13555278
• 负责人: NIITSUMA Hiroaki
• 金额: $ 5.89万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555278/
• 关键词: MEMS; Microsensor; Optical Accelerometer; Accelerometer; FPI; Multiplexing; Downhole seismic measurement; 4C detector; マイクロセンサ; 地下マイクロセンシング; 4成分弾性波検出器; ファブリ・ペロー干渉計; 3次元粒子運動軌跡; マイクロゾンデ; スペクトル行列; 多成分弾性波検出器

(a)Design of interference-type accelerometers: The frequency characteristics and sensitivity of the accelerometers were re-investigated and dimensions of the parts were decided.(b)Fabrication: We have designed a process chart for the microsensor and fabricated the sensor using facilities for micromechanical systems equiooed in VBL, Tohoku University. Morn than 10 sensors with expected interference pattern were fabricated.(c)Evaluation of the microsensors: The interference pattern, static characteristic and dynamic characteristics of the microsensors were evaluated in Lab. Then the sensors were mounted onto a metal-mount for 4C detector. Its static characteristics was investigated.(d)Field test: The 4C detector was set at the bottom of borehole in test site on campus. Artificial seismic signals from downhole airgun was detected by the 4C detector, and its in-situ performance was evaluated.

(A)干涉型加速度计的设计：重新研究了加速度计的频率特性和灵敏度，确定了部件的尺寸。(B)制造：我们设计了微传感器的流程图，并使用东北大学VBL的微机械系统设备制造了该传感器。制作了10多个具有预期干涉图案的传感器。(C)微型传感器的评价：在实验室中对微型传感器的干涉图案、静态特性和动态特性进行了评价。然后将传感器安装在金属底座上作为4C探测器。(4)现场测试：将4C探测器安装在校园内考点的井底。利用4C探测器对井下气枪产生的人工地震信号进行了探测，并对其现场性能进行了评价。

项目成果

Shiga, K., Suzuki, G., Yamada, M., Kitahara, M., Niitsuma, H.: "A fiber-optic micro sensor for AE measurement fabricated by micromachining"Progress in Acoustic Emission. 152-159 (2002)

Shiga, K.、Suzuki, G.、Yamada, M.、Kitahara, M.、Niitsuma, H.：“通过微加工制造的用于声发射测量的光纤微传感器”声发射进展。

新妻: "マイクロセンサーによる地下弾性波計測"振動技術. 25-29 (2001)

Niizuma：“使用微传感器测量地下弹性波”振动技术 25-29 (2001)。

H Asanuma, S Hasihmoto, G Suzuki, H Niitsuma, M Esashi: "Optical interference type micro hydrophone fabricated by micromachining"SEG Expanded Abstracts. 45-47 (2001)

H Asanuma、S Hasihmoto、G Suzuki、H Niitsuma、M Esashi：“通过微加工制造的光干涉型微型水听器”SEG 扩展摘要。