Development of microsensors for subsurface microsensing

开发用于地下微传感的微传感器

• 批准号: 09305068
• 负责人: NIITSUMA Hiroaki
• 金额: $ 23.42万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A).
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09305068/
• 关键词: MEMS; Microsensor; Optical Accelerometer; Capacitive Accelerometer; Optical yhdrophone; FBG; Radon sensor; Microsonde; マイクロセンサ; 地下マイクロセンシング; 加速度センサー; 光干渉型振動計; シリコンプロセス; マイクロマシニング; 弾性波センサー

1. Development of silicon capacitive accelerometer : We fabricated silicon capacitive micro accelerometers with a size of 9mmX5mmX2mm. The accelerometer had sufficient response up to 1KHz. The sensor and electrical circuit were packaged into a micro sonde and tested in mini-field.2. Development of optical accelerometer : A pure-passive optical accelerometer was fabricated. The sensor worked well at the frequency lower than 1kHz3. Development of optical hydrophone : Optical hydrophones were fabricated. The hydrophone uses interference at the end of fiber. The hydrophone had ability to detect signals in a water tank4. Fiber grating sensor : We investigated a method to create fiber Bragg grating on a fiber. A fiber sensor for a temperature compensation of a tidal wave detector was successfully fabricated with a resolution in the order of 0.001 degree-C.5. Development of Radon sensor : Miniaturized radon sensor with a sintilator and cathode was fabricated at the end of optical fiber. This sensor had ability to detect alpha-ray from standard source.

1. 硅电容式加速度计的发展：制备了尺寸为9mmX5mmX2mm的硅电容式微加速度计。加速度计有足够的响应高达1KHz。将传感器和电路封装成微型探空仪，并在微型现场进行测试。光加速度计的发展：研制了一种纯无源光加速度计。该传感器在低于1kHz3的频率下工作良好。光学水听器的发展：制备了光学水听器。水听器利用光纤末端的干扰。水听器有探测水箱里信号的能力。光纤光栅传感器：研究了在光纤上制作光纤布拉格光栅的方法。成功地制作了一种用于潮汐波探测器温度补偿的光纤传感器，其分辨率为0.001°c。氡传感器的发展：在光纤末端制备了具有谐振器和阴极的小型化氡传感器。该传感器具有检测标准源α射线的能力。

项目成果

M.Nishizawa, H.Niitsuma and M.Esashi: "Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer"Proc.SEG 2000 Annual Mtg.. (CDROM). (2000)

M.Nishizawa、H.Niitsuma 和 M.Esashi：“使用微机械硅电容式加速度计的小型化井下地震探测器”Proc.SEG 2000 年年度 Mtg.. (CDROM)。

Asamuma H.,Miyazawa H.,Niitsuma H.,and Esashi M.: "Optical interference type micro hydrophone fabricated by micromachining"SEG Expanded Abstracts. (in-press). (2000)

Asamuma H.、Miyazawa H.、Niitsuma H.、Esashi M.：“通过微加工制造的光干涉型微型水听器”SEG 扩展摘要。

西澤,林,新妻,江刺: "マイクロマシニングによるシリコン容量型加速度センサの製作とその特性評価" 物理探査学会第98回学術講演会講演論文集. 101-105 (1998)

Nishizawa、Hayashi、Niizuma、Esashi：“微机械加工硅电容式加速度传感器的制作及其特性的评估”物理探索学会第 98 届学术会议论文集 101-105 (1998)。

新妻: "地下マイクロセンシング技術,2-7"超音波テクノ. 12(8). 2-7 (2000)

Niizuma：“地下微传感技术，2-7”超声波技术 12(8) (2000)。

Hirata K.,Niitsuma H.,and Esashi M.: "Fabrication and characterization of a downhole micro accelerometer using a fabry-pero interferometer"Proc. 5th Well Logging Symposium of Japan. W1-W9 (1999)

Hirata K.、Niitsuma H. 和 Esashi M.：“使用法布里-珀罗干涉仪的井下微加速度计的制造和表征”Proc。