Development of microsensors for subsurface microsensing

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1. Development of silicon capacitive accelerometer : We fabricated silicon capacitive micro accelerometers with a size of 9mmX5mmX2mm. The accelerometer had sufficient response up to 1KHz. The sensor and electrical circuit were packaged into a micro sonde and tested in mini-field.2. Development of optical accelerometer : A pure-passive optical accelerometer was fabricated. The sensor worked well at the frequency lower than 1kHz3. Development of optical hydrophone : Optical hydrophones were fabricated. The hydrophone uses interference at the end of fiber. The hydrophone had ability to detect signals in a water tank4. Fiber grating sensor : We investigated a method to create fiber Bragg grating on a fiber. A fiber sensor for a temperature compensation of a tidal wave detector was successfully fabricated with a resolution in the order of 0.001 degree-C.5. Development of Radon sensor : Miniaturized radon sensor with a sintilator and cathode was fabricated at the end of optical fiber. This sensor had ability to detect alpha-ray from standard source.