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Influence of Temperature Field on Generation Characteristics of Nano-Bubbles and Their Application to the Environmental Friendly Cleaning Technology

温度场对纳米气泡生成特性的影响及其在环保清洗技术中的应用

基本信息

批准号：
15360117
负责人：
YABE Akira
金额：
$ 9.41万
依托单位：
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

项目摘要

As for the influence of the temperature on the generation characteristics of nano-bubbles, the amount of generating nano-bubbles was increased according to the lowering of the temperature. This would be due to the increased gas saturation capacity to the liquid for the lower temperature. At the lower temperature, the total amount of the saturated gas would be increased and thus the released gas amount would be increased to make the larger number of nano-bubbles.As for the cleaning effect of nano-bubbles, the liquid circulating experimental apparatus was manufactured and nano-bubbles were generated by applying the ultrasonic waves to the liquid. For the contaminated plate, the minute particle contamination on the plate was selected as the typical example of the actual technical needs to the semiconductor industries. The application of supplying nano-bubbles was realized by contained in the liquid water flow with the velocity of several meters per second.The following conclusion were obtained from the experimental results.(1)As the generation of nano-bubbles, about 8000 nano-bubbles with the diameter between 500nm and 1000nm were able to be generated for 10ml by applying ultrasonic waves of 850kHz to the ultra-clean liquid water.(2)By applying nano-bubbles with the stagnation flow of ultra-clean liquid water to the contaminated plate which was contaminated by the nearly 50nm alumina fine particles, cleaning effects was actually realized by the amount of 99% for the volume ratio, and 92% for the area ratio. Otherwise, by applying only the ultra-clean liquid water or the liquid water containing micrometer scale bubbles no significant cleaning effects was observed.

至于温度对纳米气泡产生特性的影响，随着温度的降低，纳米气泡的生成量增加。这是由于较低温度下液体的气体饱和容量增加所致。对于纳米气泡的清洗效果，制作了液体循环实验装置，通过对液体施加超声波产生纳米气泡。对于被污染的平板，选择了平板上的微小颗粒污染作为半导体行业实际技术需求的典型例子。实验结果表明：(1)在纳米气泡的产生过程中，对超净液水施加850 kHz的超声波，每10ml可产生约8000个直径在500 nm~1000 nm之间的纳米气泡。(2)对被近50 nm氧化铝微粒污染的平板施加纳米气泡，可达到99%的清洗效果。面积比为92%。否则，仅使用超清洁的液态水或含有微米级气泡的液态水，没有观察到显著的清洗效果。