Fabrication of Carbon Rod Arrays Structure Using Self-organized Nano-hole Template and Its Application for Emitter

铝的阳极氧化在表面形成纳米尺寸的孔。通过选择工艺条件，可以使相同尺寸的纳米孔自组织地规则排列。电解抛光对10平方毫米的高纯铝板进行表面光整。阳极氧化采用3 ℃冷却的0.3M草酸溶液进行两步阳极氧化。之后通过磷酸处理扩大孔。SEM观察表明，孔的直径为70 nm，深度为500 nm。制备了聚苯乙烯（PS）和聚丙烯腈（PAN）有机溶液。聚丙烯腈是碳纤维的原料。将这些溶液滴在纳米孔物质表面，并使其干燥。在将硅衬底粘附在表面上之后，蚀刻溶液去除氧化铝模板。扫描电镜观察显示聚合物纳米棒有序排列，直径约为65 nm。纳米孔模板的形式可以很好地复制到聚合物中，形成聚合物纳米结构。接着，PAN在250 ° C下在大气中加热以在碳化过程中稳定。在该过程之后，在氩气中进行600 - 700 ° C的加热，并且其蒸发。碳化后，SEM观察显示直径为45 ~ 60 nm的纳米棒。此外，拉曼光谱具有1585 cm-1和1360 cm-1的峰<-1>，被<-1>指定为双折射结构。结果证实了纳米碳结构的形成。此外，SEM图像中碳纳米结构的尖端部分明亮地发光，并且存在大量的二次电子放电。它被认为具有作为电子发射体的高潜力。

Anodization of aluminum forms the hole of nano meter size in the surface. By choosing processing conditions, it is possible to arrange regularly the nano hole of the same size in self-organization. Electrolysis polish performed surface smoothing for the domain of 10mm square of the high purity aluminum plate. Anodization carried out two-step anodization using the oxialic acid solution of 0.3M cooled at 3 □. A hole was expanded by phosphoric acid processing after that. SEM observation shows that the hole has the diameter of 70nm and the depth of 500nm. The polystyrene (PS) and he polyacrylonitrile (PAN) organic solution were prepared. PAN is the raw materials for carbon fiber. These solutions were dropped at the nanohole substance surface, and it dried. After sticking a silicon substrate on the surface, Etching solution removed the alumina template. SEM observation shows orderly arranging polymer nano-rod with a diameter of about 65nm. The form of a nano hole template could copy well to the polymers, and the polymer nano structures were formed. Next, PAN was heated at 250□ in the atmosphere for the stabilization in the carbonization process. Following this process, heating of 600〜700□ was performed in argon, and it carbonized. After carbonization, SEM observation shows nano-rod with a diameter of 45〜60nm. Moreover, Raman spectra have the peaks of 1585cm^<-1> and 1360cm^<-1> assigned as carbonized structure. The result confirms the formation of nano carbon structure. Moreover, the tip part of carbon nano structure in SEM image shone brightly, and there were many amounts of secondary electronic discharge. It is considered to have the high potential as electron emitter.