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Fundamental study on design and fabrication of photonic crystal bent waveguide

光子晶体弯曲波导设计与制作基础研究

基本信息

批准号：
15360193
负责人：
IKUNO Hiroyoshi
金额：
$ 7.1万
依托单位：
KUMAMOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15360193/
关键词：
photonic crystal bent waveguide branching waveguide optical circuit device multidimensional wave digital filters FD-TD method

项目摘要

We have analyzed the characteristics of sharply bent optical waveguides constructed by two-dimensional photonic crystal of circular air-holes in silicon on a triangular array numerically. The highly efficient bent waveguides are the key devices to realize compact integrated optical circuits. The method of solution is finite-difference time-domain(FD-TD) method based on the principles of multidimensional wave digital filters ; this method can easily be implemented and is more accurate than the conventional one, the Yee algorithm.First, we have checked the dispersion relation of the waveguides and confirm the performance of a single mode propagation that is attained in the cutoff frequencies of higher-order modes. We have calculated the design parameter of photonic crystal to maximize the bandwidth of single mode region. Next, we have proposed a reflection-free sharply bent waveguide with the microcavity. We have shown that reflected waves from the sharply corner can be completely eliminated by the microcavity due to resonant tunneling and shown that transmission bands can be controlled by changing structure of the microcavity. Next we have also analyzed the branching waveguide with the microcavity and shown that loss-less power dividing can be realized. Finally, we have fabricated the photonic crystal waveguide on a silicon-on-insulator(SOI) wafer. The waveguide patterns are defined by electron beam writer. We have checked the accuracy of waveguide pattern and optimized the fabrication condition.

本文用数值方法分析了由三角形阵列上的圆形空气孔二维光子晶体构成的大弯曲光波导的特性。高效弯曲波导是实现紧凑型集成光路的关键器件。求解方法是基于多维波数字滤波器原理的时域有限差分法（FD-TD），该方法易于实现，比传统的Yee算法精度更高。首先，我们检查了波导的色散关系，并确认了在高阶模的截止频率处获得的单模传播性能。我们计算了光子晶体的设计参数，使单模区的带宽最大化。其次，我们提出了一种具有微腔的无反射大弯曲波导。我们已经表明，反射波从尖锐的角落可以完全消除的微腔由于共振隧穿，并表明，可以通过改变微腔的结构来控制传输带。接着，我们还分析了带有微腔的分支波导，并证明了可以实现无损耗的功率分配。最后，我们在绝缘体上硅（SOI）晶片上制作了光子晶体波导。波导图案由电子束写入器限定。对波导图形的精度进行了检验，并优化了制作条件。