Combined reactor for the plasma-enhanced chemical vapour deposition (PECVD) of amorphous layers of silicon, silicon nitride and silicon oxide, and for Reactive Ion Etching

用于硅、氮化硅和氧化硅非晶层等离子增强化学气相沉积 (PECVD) 以及反应离子蚀刻的组合反应器

• 批准号: LE0561240
• 负责人: Prof Andres Cuevas
• 金额: $ 8.1万
• 依托单位: The Australian National University
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Infrastructure, Equipment and Facilities
• 财政年份: 2005
• 资助国家: 澳大利亚
• 起止时间: 2005-01-01 至 2005-12-31
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LE0561240
• 关键词: Combined; reactor; plasma; enhanced; chemical

Our small, but very productive group (up to 30 publications per Discovery grant) has reached critical mass (8 people), and the acquisition of essential infrastructure is peremptory. Without the proposed plasma reactor our strong international impact (10 papers, one invited, at the 2003 world conference on photovoltaics) will wane. This machine permits to deposit thin layers of silicon nitride and amorphous silicon and is a versatile tool for investigating silicon materials for photovoltaics and microelectronics. Such reactors have become an essential tool for silicon solar cell work. Most laboratories across the world have at least one, including UNSW, but access to the latter is impractical.

我们这个规模不大但非常富有成效的团队(每个发现基金最多出版30份出版物)已经达到了临界点(8人)，而且必须获得必要的基础设施。如果没有拟议的等离子体反应堆，我们强大的国际影响力(10篇论文，1篇邀请，在2003年世界光伏大会上被邀请)将减弱。这台机器可以沉积氮化硅和非晶硅的薄层，是研究用于光伏和微电子的硅材料的多功能工具。这样的反应堆已经成为硅太阳能电池工作的重要工具。世界各地的大多数实验室至少有一个，包括新南威尔士大学，但进入后者是不切实际的。