A development of rolling bearings with 10nm level in non-repetitive run-out

本研究为研制10 nm级无重复跳动滚动轴承做了基础性研究。研究结果表明：(1)保持架旋转部件的非重复跳动(NRRO)值主要是由一个轴承内的滚珠直径差引起的。但在长期测量NRRO的情况下，经常会观察到固位体旋转的NRRO出现突变。对于这一现象，几何误差不被认为是原因。在这项研究中，我们制作了一种可以让润滑状态有意识地改变的仪器，并研究了润滑波动对保持器旋转的NRRO的影响。结果表明，润滑波动是保持架旋转的NRRO在纳米级变化的原因。(2)保持架旋转频率的NRRO主要是由同一轴承所含滚珠的直径差引起的。此外，它是Kno…此外，球的轨道间距不等会影响保持架旋转频率的NRRO。但关于这一点的定量研究很少。在这项研究中，我们通过故意拔出球来研究球的不等轨道间距对保持器旋转的NRRO的影响。结果表明，滚珠轨道间距差越大，保持架自转频率的NRRO越大。(3)保持架自转的NRRO值主要是由安装在轴承中的滚珠直径差引起的。此外，当多个球的直径不同时，保持器旋转的NRRO值据信会随球的位置而变化。在本研究中，我们从理论上分析了考虑安装在轴承中的球的直径差和位置的情况下保持架旋转的NRRO值。结果表明，随着滚动轴承中滚珠数量的增加，在滚珠所有位置计算的保持架旋转分量的平均值都减小。较少

In this research, the fundamental research was accomplished for a development of rolling bearings with 10 nm level in non-repetitive run-out. The results are summarized as follows ;(1)The non repetitive run-out(NRRO) value of the components of cage rotation is mainly caused by the diameter differences of balls contained in one bearing. But in case of measuring NRRO for a long time, it was often observed that the NRRO of retainer rotation fluctuated suddenly. As for this phenomenon, geometric errors were not regarded as a cause. In this research, we produced the instrument which could let a lubrication state change intentionally and investigated the influence of lubrication fluctuation on the NRRO of retainer rotation. It was cleared that the lubrication fluctuation was the cause of the change of the NRRO of retainer rotation in nm level.(2)The NRRO of rotational frequency of the cage is mainly caused by the diameter differences of balls contained in one bearing. In addition, it was kno … More wn that the unequal orbital intervals of balls could influence the NRRO of rotational frequency of the cage. But there were few quantitative studies about this. In this research, we investigated the influence of the unequal orbital intervals of balls on the NRRO of retainer rotation by pulling out balls intentionally. It was clarified that the NRRO of rotational frequency of the cage became large if the difference between orbital intervals of balls was large.(3)The NRRO value of retainer revolution is caused mainly by the diameter differences of balls mounted in a bearing. Additionally, when more than one ball has diameter difference, the NRRO value of retainer revolution is believed to vary with the location of balls. In this research, we theoretically analyzed the NRRO value of retainer revolution considering the diameter differences and location of balls mounted in a bearing. Consequently, it is clarified that the mean value of the retainer revolution component calculated in all locations of balls decreased with increasing number of balls in a rolling bearing. Less