Studies on electron beam devices using a micro emitter
Studies on electron beam devices using a micro emitter
批准号:
15560288
负责人:
SATO Nobuyuki
金额:
$1.98万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (C)
财政年份:
2003
资助国家:
日本
项目状态:
已结题
起止时间:
2003 至 2004
中文摘要
利用碳纳米管制备了微发射器,并对其在毫米波和亚毫米波电子束器件中的应用进行了测试。首先,我们制作了一个环形发射区的发射极。由于碳纳米管细丝的不均匀性,发射极的电子发射被限制在100nA以内。采用控制良好的均匀碳纳米管细丝制备了第二极体。发射电流高达60uA,但在发射中观察到耗散不均匀的发射模式。假定非必要发射的原因是电场的集中和发射区边缘蚁丝的不均匀性。研究了抑制非必要辐射的方法。
英文摘要
Micro emitters using carbon nanotube were fabricated and tested for application to electron beam devices in millimeter and sub-millimeter region. First of all we fabricated an emitter with ring emitting area. The electron emission from the emitter was limited up to 100nA due to ununiformity of cnt filaments. The second emitter was fabricated by using well controlled uniform cnt filamnets. The emission current up to 60uA was obtained, but dissipative ununiform emission patterns were observed in the emission. The cause of unnecessary emission was presumed that the concentration of the electric field and ununiformity of the ant filaments in the edge of the emitting area. The method of suppressing the unnecessary emission was examined.
期刊论文(2)
专著(0)
科研奖励(0)
会议论文
Microelectron field emitter array with focus lenses for multielectron beam lithography based on insulator wafer
基于绝缘体晶圆的多电子束光刻用聚焦透镜微电子场发射器阵列
DOI:
--
发表时间:
2004
期刊:
J.Vac.Sci.Tech. B22
影响因子:
--
作者:
[P.N.Minh, T.Oho, N.Sato et al.]
通讯作者:
N.Sato et al.
Autoimmune disorder in hereditary angioedema
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批准号:26460654
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项目类别:Grant-in-Aid for Scientific Research (C)
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资助金额:$3.24万
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财政年份:2014
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负责人:SATO Nobuyuki
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依托单位:
Study on enhancement in emission current of plane-type tunneling cathodes by controlling the work function
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批准号:10450130
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$0.96万
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财政年份:1998
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负责人:SATO Nobuyuki
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依托单位:
海外基金