Studies on electron beam devices using a micro emitter

利用碳纳米管制作了微发射体，并对其在毫米和亚毫米电子束器件中的应用进行了测试。首先，我们制作了一个环形发射区的发射体。由于碳纳米管细丝的不均匀，发射体的电子发射被限制在100nA以下。利用控制良好的均匀碳纳米管制备了第二发射区。获得了高达60uA的发射电流，但发射中观察到了耗散的不均匀发射模式。不必要发射的原因推测是电场的集中和发射区域边缘蚂蚁灯丝的不均匀所致。研究了抑制不必要排放的方法。

Micro emitters using carbon nanotube were fabricated and tested for application to electron beam devices in millimeter and sub-millimeter region. First of all we fabricated an emitter with ring emitting area. The electron emission from the emitter was limited up to 100nA due to ununiformity of cnt filaments. The second emitter was fabricated by using well controlled uniform cnt filamnets. The emission current up to 60uA was obtained, but dissipative ununiform emission patterns were observed in the emission. The cause of unnecessary emission was presumed that the concentration of the electric field and ununiformity of the ant filaments in the edge of the emitting area. The method of suppressing the unnecessary emission was examined.