Novel Numerical Technique for the Analysis of the MEMS Structures with Moving Part by Using the Body Fitted Grid Generation Method with Moving Boundaries and MRTD Method

MEMS是利用集成微制造方法实现的最小化机电设备和系统。由于其相对于p-i-n二极管或场效应管开关的优点，在射频领域得到了迅速的发展。MEMS器件的主要应用领域是IT（信息技术）、生物电磁学、医学科学。要实现微波器件，如移相器、耦合器、滤波器或调谐器中使用的RF MEMS结构，需要准确了解移动或旋转物体周围的电磁演化。但在电磁场中数值求解这些问题是一件繁琐的工作。动边界问题的计算技术主要是在传热和流体流动领域进行的。黑田将这种新方法扩展到用FD-TD方法分析电磁场和具有运动部件的MEMS器件。该技术被应用于分析的MEMS器件与运动部件。利用该方法分析了带运动部件的可变电容器。的速度，加速度和位移之间的数值结果，也MEMS天线，它有一个移动的情况下的谐振频率的偏移。这种数值计算技术对于实现新型RF-MEMS器件具有很大的前景。这些结果发表在2003年的IEEJ Trans，2004年的IEICE Tarns和ACES Journal上。这些标准也在ACES 2003、IEEE APS/URSI 2003、PIERS 2003、IEEE TCWCT 2003、PIERS 2004、ACES 2004、IEEE APS/URSI 2004、IEEE/ACES 2005中得到了介绍。并将在IEEE APS/URSI 2005中提出。

MEMS are minimized electromechanical devices and systems that are realized using integrated micro fabrication method. And the technology is growing rapidly in RF field, because of the advantage over p-i-n diode or FET switches. The main application areas of MEMS devices are IT(Information Technology), Bioelectromagnetics, Medical Science. An accurate knowledge of the electromagnetic evolution around a moving or rotating body is required for the realization of microwave devices, such as the RF MEMS structures used in phase-shifters, couplers, filters or tuners. But it is tedious to solve these problems numerically in electromagnetic field. Computational technique for the moving boundary problems have been pursued mainly in heat and fluid flow area. Kuroda expanded this novel method to analyze with the FD-TD method in EM field and MEMS devices with moving parts. This technique was applied for the analysis of the MEMS devices with moving parts. By using this technique, variable capacitors with moving parts are analyzed. Numerical results between the velocity, acceleration and displacements are shown and also the MEMS antenna, which has a shift of the resonance frequency for the moving case. This numerical technique has great promise for the realization of new RF-MEMS devices. These results were published in IEEJ Trans in 2003,IEICE Tarns and ACES Journal in 2004. And they were also presented in ACES2003, IEEE APS/URSI2003,PIERS2003,IEEE TCWCT2003,PIERS2004,ACES2004,IEEE APS/URSI2004,IEEE/ACES2005. and will be presented in IEEE APS/URSI2005.