Novel Numerical Technique for the Analysis of the MEMS Structures with Moving Part by Using the Body Fitted Grid Generation Method with Moving Boundaries and MRTD Method

MEMS是使用集成微加工方法实现的最小化机电设备和系统。由于相对于p-i-n二极管或FET开关的优势，这项技术在射频领域得到了迅速的发展。MEMS器件的主要应用领域是信息技术、生物电磁学、医学。要实现微波器件，如移相器、耦合器、滤波器或调谐器中使用的RFMEMS结构，需要对运动或旋转物体周围的电磁演化有准确的了解。但是在电磁场中对这些问题进行数值求解是非常繁琐的。移动边界问题的计算技术主要是在热流和流体流动领域进行的。黑田东彦将这一新方法推广到电磁场中的FD-TD方法和带有运动部件的MEMS器件的分析。将该方法应用于含有运动部件的MEMS器件的分析。利用该方法对带运动部件的可变电容器进行了分析。给出了速度、加速度和位移之间的数值结果，并给出了运动情况下MEMS天线的共振频率漂移的结果。这种数值计算技术对新型RF-MEMS器件的实现具有很大的应用前景。这些结果发表在2003年的IEEJ Trans、2004年的IEICE Tarns和ACES期刊上。并在ACES2003、IEEE APS/URSI2003、PIERS2003、IEEE TCWCT2003、PIERS2004、ACES2004、IEEE APS/URSI2004、IEEE/ACES2005中公布。并将在IEEE APS/URSI2005中公布。

MEMS are minimized electromechanical devices and systems that are realized using integrated micro fabrication method. And the technology is growing rapidly in RF field, because of the advantage over p-i-n diode or FET switches. The main application areas of MEMS devices are IT(Information Technology), Bioelectromagnetics, Medical Science. An accurate knowledge of the electromagnetic evolution around a moving or rotating body is required for the realization of microwave devices, such as the RF MEMS structures used in phase-shifters, couplers, filters or tuners. But it is tedious to solve these problems numerically in electromagnetic field. Computational technique for the moving boundary problems have been pursued mainly in heat and fluid flow area. Kuroda expanded this novel method to analyze with the FD-TD method in EM field and MEMS devices with moving parts. This technique was applied for the analysis of the MEMS devices with moving parts. By using this technique, variable capacitors with moving parts are analyzed. Numerical results between the velocity, acceleration and displacements are shown and also the MEMS antenna, which has a shift of the resonance frequency for the moving case. This numerical technique has great promise for the realization of new RF-MEMS devices. These results were published in IEEJ Trans in 2003,IEICE Tarns and ACES Journal in 2004. And they were also presented in ACES2003, IEEE APS/URSI2003,PIERS2003,IEEE TCWCT2003,PIERS2004,ACES2004,IEEE APS/URSI2004,IEEE/ACES2005. and will be presented in IEEE APS/URSI2005.