Analytic Field Emission Scanning Electron Microscope with Soft X-ray and Raman Spectrometer

在亚琛工业大学，高分辨率扫描电子显微镜（SEM）是一种不可或缺的方法，可用于对新材料的形态、化学和晶体微结构进行广泛表征。已经安装在亚琛工业大学的扫描电子显微镜无法满足表征能源材料的需求，特别是关于锂作为低质量元素以及无机和有机材料的复合材料。因此，需要一种配备有软X射线检测器和拉曼光谱仪的最先进的场发射SEM。

At RWTH Aachen, high resolution scanning electron microscopy (SEM) is an indispensable method for extensive characterization of novel materials with respect to morphology, chemical and crystallographic microstructure. Scanning electron microscopes already installed at RWTH Aachen cannot cover the needs for characterizing energy materials, in particular concerning lithium as a low mass element and composites of inorganic and organic materials. Therefore, a state-of-the-art field emission SEM equipped with a detector for soft X-rays and a Raman spectrometer is requested.