300kV Cs-corrected transmission electron microscope

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The requested scanning transmission electron microscope (STEM) with a monochromatized electron beam is a microscope with highest resolution. Based on the corrected spherical aberration, structural and analytical investigations with subatomic resolution are feasible and the instrument will be used mainly in the area of solid state-based fundamental research. Various detectors (ABF, HAADF, DPC, etc.) for bright and dark field imaging allow within the STEM mode the determination of the elemental composition, details of the crystal structure (4DSTEM) as well as electric fields on the atomic scale. By means of EDX and EELS (together with a low-dose option), detailed and reliable studies of the chemical elements, their binding states and the electronic structure as well as electronic excitations in complex materials and (sensitive) nanostructures, which play a central role in engineering and natural sciences at the TU Chemnitz, are envisaged. The instrument configuration is optimized with regard to highest resolution, best possible detection sensitivity of the integrated analysis systems (EDX, EELS), the working possibilities with sensitive samples as well as the complex data acquisition when scanning over sample areas (4DSTEM).