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MOLECULAR THERMAL ENGINEERING RESEARCH ON CONDENSATION

凝聚态分子热工程研究

基本信息

批准号：
05239101
负责人：
KOTAKE Susumu
金额：
$ 66.94万
依托单位：
TOYO UNIVERSITY (1995)The University of Tokyo (1993-1994)
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research on Priority Areas
财政年份：
1993
资助国家：
日本
起止时间：
1993 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05239101/
关键词：
Molecular condensation Film condensation Thermal and chemical CVD Cluster Fineparticle Thin film Condensation control Molecular thermal Engineering 熱CVD・プラズマCVD

项目摘要

With the aim of understanding the molecular mechanism of clustering and film condensation of gaseous atoms and molecules and of finding the controlling techniques for fine-particle and thin-film processing, the following subjects have been studied theoretically and experimentally ; (1) Molecular mechanism of cluster formation and film condensation, (2) Control of film thickness, composition and crystal structure of thermal CVD process, (3) Fundamental processes of thin film condensation of metal atoms, (4) Micro-scale heat transfer in formation processes of clusters and thin films, (5) Molecular kinetic theory of phase change, (6) Molecular dynamics of cluster formation, (7) Atomic and molecular behavior in laser ablation, (8) Formation and growth processes of fine particles in gaseous reaction, (9) Molecular dynamics mechanism of condensation and evaporation of liquid molecules, (10) Effects of small temperature gradient on CVD process. The major results yield the relationships betwee … More n the cluster size the film condensation rate, film condensation mechanism of thermal CVD with surface reactions, evidence of uniform and rapid film formation by high-speed rotating thermal CVD,effects of translational energy of condensing metallic atoms on film condensation, detection of cluster formation in expansion beams of metallic atoms by a retarding electric field method, condensation coefficients of methanol vapor with the shock-tube method by measuring the film thickness and temperature change, molecular dynamics processes of cluster and hydrogen-bond formation of water molecules, atomic and molecular behavior in the process of laser ablation of high-temperature super-conducting thin film through in-situ observation using laser-induced fluorescence, sintering and growth characteristics of fine particles formed in gaseous reactions, molecular dynamics mechanism of condemsation and evaporation of liquids, and effects of small temperature gradient on CVD process through formed radicals. Less

为了理解气体原子和分子的成团和成膜凝聚的分子机理，并找到细颗粒和薄膜加工的控制技术，从理论和实验上研究了以下问题：（1）团簇形成和膜凝聚的分子机理，（2）热CVD工艺的膜厚、成分和晶体结构的控制，（3）金属原子薄膜凝聚的基本过程，（4）团簇和薄膜形成过程中的微尺度传热，（5）相变的分子动力学理论，（6）团簇形成的分子动力学，（7）激光烧蚀中的原子和分子行为，（8）气体反应中细颗粒的形成和生长过程，（9）液体分子凝结和蒸发的分子动力学机制。（10）小温度梯度对CVD过程的影响。主要结果给出了它们之间的关系 ...更多信息在团簇尺寸、膜凝结速率、热CVD的膜凝结机理和表面反应、高速旋转热CVD均匀快速成膜的证据、凝结金属原子的平动能对膜凝结的影响、延迟电场法检测金属原子膨胀束中的团簇形成、用激波管法通过测量膜厚和温度的变化，得到了甲醇蒸汽的冷凝系数，水分子形成团簇和氢键的分子动力学过程，通过激光诱导荧光原位观察高温超导薄膜激光烧蚀过程中的原子分子行为，气相反应中形成的细颗粒的烧结和生长特性，分子动力学机理，以及小温度梯度通过形成自由基对CVD过程的影响。少