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The Role of Metastable Species for High Pressure Glow Discharge Formation

亚稳态物质在高压辉光放电形成中的作用

基本信息

批准号：
16540452
负责人：
TOCHIKUBO Fumiyoshi
金额：
$ 2.43万
依托单位：
Tokyo Metropolitan University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-16540452/
关键词：
nonthermal high pressure plasma dielectric barrier discharge glow discharge metastable species laser absorption spectroscopy gas discharge simulation microplasma

项目摘要

The role of the metastable species for high pressure glow discharge formation in dielectric barrier discharge (DBD) geometry has been investigated experimentally and theoretically.In the experiment, we carried out the electrical characteristics measurement, discharge configuration observation, optical emission spectroscopy and laser absorption spectroscopy for Ar(1s_5) measurement in high pressure Ar-based gas in DBD at various condition. Influence of Penning effect on high pressure glow discharge formation is studied in Ar with adding a small amount of C_2H_4, which has lower ionization potential than excitation potential of Ar(1S_5). In addition, the glow discharge was used for wastewater treatment.In the numerical simulation using fluid model, the influence of Penning ionization was investigated in Ar/C_2H_4 mixtures under the same condition as the experiment. The contribution of stepwise ionization in microplasma (dc microplasma, DBD microplasma with coplanar electrode) was also investigated as well as the microplasma formation processes. In addition, we have verified how the electron avalanche from a seed electron develops into glow discharge.The main conclusion is as follows.1) For stable atmospheric pressure glow discharge formation without streamers, it is important to enhance the effective ionization coefficient at low E/N region by means of Penning ionization. Ar mixtures with C_2H_4, C_2F_4 and SiH_4 are expected to form atmospheric pressure glow discharge for real plasma processing.2) Penning ionization works very effectively in positive column in atmospheric pressure microplasmas. Gas heating and ion drag force causes the strong gas flow.3) The radial expansion of the gas discharge from a seed electron originated electron avalanche requires the sufficient diffusion of electron or metastable species.

本文从实验和理论两方面研究了介电阻挡放电（DBD）几何中亚稳态物质对高压辉光放电形成的作用。在实验中，我们对DBD中高压Ar基气体在不同条件下的Ar（1s_5）进行了电特性测量、放电构型观察、光学发射光谱和激光吸收光谱测量。在氩气中加入少量电离电位低于激发电位的C_2H_4，研究了彭宁效应对高压辉光放电形成的影响。此外，还将辉光放电用于废水处理。在流体模型的数值模拟中，在与实验相同的条件下，研究了Ar/C_2H_4混合物中Penning电离的影响。研究了微等离子体（直流微等离子体、共面电极DBD微等离子体）中逐步电离的作用以及微等离子体的形成过程。此外，我们还验证了电子雪崩是如何从种子电子发展成辉光放电的。主要结论如下。1)为了在无流光的情况下形成稳定的大气压辉光放电，通过Penning电离提高低E/N区域的有效电离系数是很重要的。氩与C_2H_4、C_2F_4和SiH_4的混合物有望在实际等离子体处理中形成常压辉光放电。彭宁电离在常压微等离子体正柱中工作非常有效。气体加热和离子阻力使气体流动强烈。3)种子电子源电子雪崩气体放电的径向膨胀需要电子或亚稳态物质的充分扩散。

项目成果

期刊论文数量（34）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Influence of Penning Ionization for Glow-like Discharge Formation in Dielectric Barrier Discharge in Ar-Based Gas

潘宁电离对氩基气体介质阻挡放电中类辉光放电形成的影响

DOI：
发表时间：
2006
期刊：
Proc. of 10th International Symposium on High Pressure Low Temperature Plasma Chemistry
影响因子：
0
作者：
Y.Kandraskin;M.S.Asano;A.van der Est;F.Tochikubo
通讯作者：
F.Tochikubo

Simulation of gas heating in radio frequency driven microdischarge in Ar

氩气中射频驱动微放电气体加热模拟