权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Development of a grazing incidence electron-induced x-ray emission spectroscopy technique for in-depth analysis of oxide thin films.

开发掠入射电子诱导 X 射线发射光谱技术，用于深入分析氧化物薄膜。

基本信息

批准号：
17560020
负责人：
KASHIWAKURA Takayuki
金额：
$ 1.86万
依托单位：
Utsunomiya University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2006
项目状态：
已结题

项目摘要

1. For extending the analysis energy range to the soft x-ray region, a new spectrometer of the grazing incidence electron-induced x-ray emission spectroscopy (GIEXES) apparatus was constructed. By using this, a Bragg angle of 70° has been feasible, and it has been possible to measure an O Kα line with an enough resolution for chemical state analysis. By incorporating a newly developed positioning mechanism of x-ray detector, the experimental condition can be quickly optimized, and a rapid analysis has become feasible.2. Data analysis programs for GIEXES were developed, and a Monte Carlo simulation program for giving a good basis for in-depth analysis was developed.3. The surface oxidation states of metallic irons were studied by GIEXES. In-depth analyses were performed by changing the accelerating voltage of the electron beam. The ratios of the x-ray intensities from the surface oxidized layer to those from the buried metallic iron substrate were evaluated from analyses based on Fe Lα/Lβ intensity ratios. In the study of thermal oxidation of LaSix/Si(100), a peak-fit program was also developed. By using this program, it has been possible to quantitatively analyze the x-ray spectral components of the surface silicate layer and the buried silicon substrate.4. In the present study, developments of a GIEXES apparatus, a measurement program and a data analysis program have almost been completed. It has been shown that GIEXES is very useful for quantitative chemical state analysis in the nanometer depth range.

1.为了将分析能量范围扩展到软X射线区，搭建了掠入射电子诱导X射线发射能谱(GIEXES)装置。利用这种方法，布拉格角为70°是可行的，并有可能测量一条具有足够分辨率的O Kα线，用于化学状态分析。通过引入新开发的X射线探测器定位机构，可以快速优化实验条件，实现快速分析。编制了GIEXES数据分析程序，并开发了蒙特卡罗模拟程序，为深入分析奠定了良好的基础。用GIEXES研究了金属铁的表面氧化态。通过改变电子束的加速电压进行了深入的分析。根据Fe Lα/Lβ强度比的分析，估算了表面氧化层与埋藏金属铁衬底的X射线强度比。在LaSix/Si(100)热氧化研究中，还开发了一个峰拟合程序。通过使用该程序，可以定量分析表面硅酸盐层和埋硅衬底的X射线能谱成分。在本研究中，GIEXES仪器、测量程序和数据分析程序的开发工作已基本完成。结果表明，GIEXES对于纳米深度范围内的定量化学状态分析是非常有用的。