Development of a grazing incidence electron-induced x-ray emission spectroscopy technique for in-depth analysis of oxide thin films.

1. 为了将分析能量范围扩展到软x射线区域，构建了一种新的掠入射电子诱导x射线发射光谱仪（GIEXES）。利用这种方法，可以实现70°的Bragg角，并且可以测量具有足够分辨率的O - k - α谱线，用于化学态分析。结合新开发的x射线探测器定位机构，可以快速优化实验条件，使快速分析成为可能。开发了GIEXES的数据分析程序，并开发了蒙特卡罗模拟程序，为深入分析提供了良好的基础。用GIEXES研究了金属铁的表面氧化态。通过改变电子束的加速电压进行了深入的分析。根据Fe Lα/Lβ强度比分析了表面氧化层与埋藏金属铁衬底的x射线强度之比。在LaSix/Si（100）的热氧化研究中，还开发了一个峰值拟合程序。利用该程序，可以定量分析表面硅酸盐层和埋地硅衬底的x射线光谱成分。在目前的研究中，GIEXES仪器、测量程序和数据分析程序的开发已经基本完成。研究表明，GIEXES在纳米深度范围内的化学状态定量分析是非常有用的。

1. For extending the analysis energy range to the soft x-ray region, a new spectrometer of the grazing incidence electron-induced x-ray emission spectroscopy (GIEXES) apparatus was constructed. By using this, a Bragg angle of 70° has been feasible, and it has been possible to measure an O Kα line with an enough resolution for chemical state analysis. By incorporating a newly developed positioning mechanism of x-ray detector, the experimental condition can be quickly optimized, and a rapid analysis has become feasible.2. Data analysis programs for GIEXES were developed, and a Monte Carlo simulation program for giving a good basis for in-depth analysis was developed.3. The surface oxidation states of metallic irons were studied by GIEXES. In-depth analyses were performed by changing the accelerating voltage of the electron beam. The ratios of the x-ray intensities from the surface oxidized layer to those from the buried metallic iron substrate were evaluated from analyses based on Fe Lα/Lβ intensity ratios. In the study of thermal oxidation of LaSix/Si(100), a peak-fit program was also developed. By using this program, it has been possible to quantitatively analyze the x-ray spectral components of the surface silicate layer and the buried silicon substrate.4. In the present study, developments of a GIEXES apparatus, a measurement program and a data analysis program have almost been completed. It has been shown that GIEXES is very useful for quantitative chemical state analysis in the nanometer depth range.