Multidimensional and Multivariable Combined Simultaneous Measurement on High Knudsen Number Micro Flows

应用稀薄气体流动测量技术的知识，研究了高努森数微流动的多维、多变量联合同时测量问题。发展了激光诱导荧光分子标记测速技术，用于稀薄、小尺度的内部气体流动，并将其应用于微小气体流动。研究了用于压力、温度和浓度测量的有序分子膜传感器，并成功地将其应用于微小气体流动中。

Multidimensional and multivariable combined simultaneous measurement on high Knudsen number micro flows have been studied applying the knowledge of measurement technique in rarefied gas flows, where the Knudsen numbers are also large. The molecular tagging velocimetry using the laser induced fluorescence was developed for rarefied and mini-scale internal gas flows, and was applied to micro gaseous flows. The ordered molecular film sensors for pressure, temperature, and concentration measurement were investigated, and the pressure-sensitive molecular film was success-fully applied to micro gas flows.