scanning electron microscope with energy dispersive X-ray spectroscopy

具有能量色散 X 射线光谱的扫描电子显微镜

• 批准号: 512651364
• 金额: --
• 依托单位: Christian-Albrechts-Universität zu Kiel
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2022
• 资助国家: 德国
• 起止时间: 2021-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/512651364?language=en
• 关键词: scanning; electron; microscope; energy; dispersive

The proposed major research instrumentation, the scanning electron microscope with energy-dispersive X-ray spectroscopy, will allow the analysis of morphology and elemental composition of plasma-treated or plasma-deposited materials. Device with fast sample exchange and easy operation is explicitly aimed for here to allow material analysis on the daily basis and from PhD candidates without an advanced level training. The routine tasks with the scanning electron microscope will be the analysis of the material surface morphology and its changes after plasma treatment, the determination of size of nano- and microparticles, or the measurements of thickens of material or nanoparticle layers on the substrate. The elemental composition analysis with energy-dispersive X-ray spectroscopy will be used to measure material composition of catalysts (metal oxides) or 2D materials (transition metal dichalcogenide crystals) and the results of the plasma treatment (nitridation or doping).

拟议的主要研究仪器，扫描电子显微镜与能量色散X射线光谱，将允许等离子体处理或等离子体沉积材料的形态和元素组成的分析。具有快速样品交换和易于操作的设备明确旨在允许每天进行材料分析，并且无需高级培训的博士候选人。扫描电子显微镜的常规任务是分析材料表面形态及其在等离子体处理后的变化，确定纳米和微米颗粒的尺寸，或测量基底上材料或纳米颗粒层的厚度。采用能量色散X射线光谱法的元素成分分析将用于测量催化剂（金属氧化物）或2D材料（过渡金属二硫属化物晶体）的材料成分以及等离子体处理（氮化或掺杂）的结果。