scanning electron microscope with energy dispersive X-ray spectroscopy

提议的主要研究仪器，带有能量色散x射线光谱的扫描电子显微镜，将允许分析等离子体处理或等离子体沉积材料的形态和元素组成。具有快速样品交换和易于操作的设备明确针对这里，允许在没有高级水平培训的博士候选人进行日常材料分析。扫描电子显微镜的常规任务是分析材料表面形态及其等离子体处理后的变化，确定纳米和微粒的大小，或测量基材上材料或纳米颗粒层的厚度。元素组成分析与能量色散x射线光谱将用于测量材料组成的催化剂（金属氧化物）或二维材料（过渡金属二硫化物晶体）和等离子体处理的结果（氮化或掺杂）。

The proposed major research instrumentation, the scanning electron microscope with energy-dispersive X-ray spectroscopy, will allow the analysis of morphology and elemental composition of plasma-treated or plasma-deposited materials. Device with fast sample exchange and easy operation is explicitly aimed for here to allow material analysis on the daily basis and from PhD candidates without an advanced level training. The routine tasks with the scanning electron microscope will be the analysis of the material surface morphology and its changes after plasma treatment, the determination of size of nano- and microparticles, or the measurements of thickens of material or nanoparticle layers on the substrate. The elemental composition analysis with energy-dispersive X-ray spectroscopy will be used to measure material composition of catalysts (metal oxides) or 2D materials (transition metal dichalcogenide crystals) and the results of the plasma treatment (nitridation or doping).