Laser Opto-microengines using Opto-selective Absorber Thin Films

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In this research project a selective optical absorber-plate is proposed for the rotor of the opto microengine as the actuator of a micromachine. The thin films of the selective optical absorber-plate are fabricated by a vacuum deposition machine. The deposited plates are at first stage pyrex glasses and then at the second stage aluminum ones. The deposition on the pyrex glasses is for estimating the deposition rate and revealing the characteristics of the deposited films. Germanium and silicon oxide are selected as the materials for making selective optical absorber-thin films. Germanium is used as an absorbent for absorbing a visible beam from a laser generator. On the other hand, silicon oxide is selected as the materials for making a thin film with a small reflectance of the visible beam.The selective optical absorber-plates for the rotor of the opto microengines are made of aluminum plates deposited a germanium thin film and a silicon oxide thin film. The germanium film is at first deposited on aluminum flat plates and then the silicon film is deposited on the germanium film. Therefore, the rotor surface has the characteristics of small reflectance in visible rays and large reflectance in infrared rays. The surface deposited the films is named as a forward surface and on the other hand the opposite surface is a backward surface, respectively. The backward surface is an aluminum one.