Laser Opto-microengines using Opto-selective Absorber Thin Films

本研究计画提出一种选择性光学膜片，作为微机械之驱动器，应用于光微引擎之转子。选择性光学膜片的薄膜是用真空镀膜机制备的。沉积的板是在第一阶段的派热克斯玻璃，然后在第二阶段的铝。在派热克斯玻璃上的沉积是为了估计沉积速率和揭示沉积膜的特性。选择锗和氧化硅作为选择性光学薄膜的材料。锗被用作吸收来自激光发生器的可见光束的吸收剂。另一方面，选择氧化硅作为对可见光反射率小的薄膜材料，用沉积锗薄膜和氧化硅薄膜的铝板制成光微发动机转子的选择性光学波片。首先在铝平板上淀积锗膜，然后在锗膜上淀积硅膜。因此，转子表面具有在可见光中反射率小而在红外线中反射率大的特性。沉积膜的表面被称为前向表面，另一方面，相对的表面被称为后向表面。背面是铝制的。

In this research project a selective optical absorber-plate is proposed for the rotor of the opto microengine as the actuator of a micromachine. The thin films of the selective optical absorber-plate are fabricated by a vacuum deposition machine. The deposited plates are at first stage pyrex glasses and then at the second stage aluminum ones. The deposition on the pyrex glasses is for estimating the deposition rate and revealing the characteristics of the deposited films. Germanium and silicon oxide are selected as the materials for making selective optical absorber-thin films. Germanium is used as an absorbent for absorbing a visible beam from a laser generator. On the other hand, silicon oxide is selected as the materials for making a thin film with a small reflectance of the visible beam.The selective optical absorber-plates for the rotor of the opto microengines are made of aluminum plates deposited a germanium thin film and a silicon oxide thin film. The germanium film is at first deposited on aluminum flat plates and then the silicon film is deposited on the germanium film. Therefore, the rotor surface has the characteristics of small reflectance in visible rays and large reflectance in infrared rays. The surface deposited the films is named as a forward surface and on the other hand the opposite surface is a backward surface, respectively. The backward surface is an aluminum one.