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Fundamental Reserch on High Speed Fabrication of Perpendicular Magnetic Recording Media

垂直磁记录介质高速制作的基础研究

基本信息

批准号：
59420029
负责人：
IWASAKI Shun-ichi
金额：
$ 21.06万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (A)
财政年份：
1984
资助国家：
日本
起止时间：
1984 至 1985
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-59420029/
关键词：
PERPENDICULAR MAGNETIC RECORDING PERPENDICULAR MAGNETIC RECORDING MEDIUM DOUBLE LAYER MEDIUM Co-Cr PERPENDICULAR ANISOTROPY FILM MAGNETRON SPPUTERING METHOD 高速・連続スパッタ法

项目摘要

With respect to high-speed fabrication of perpendicular recording media, the design criterion on the double layer media, the high speed and continuous sputtering method of the media, and the properties and performances of the prepared media were studied.1. Both the recording layer of the Co-Cr perpendicular anisotropy film and the soft magnetic back layer were designed experimentally so as to show high sensitibities of both recording and reproducing and high density response. The design concepts has been clarified theoretically by analyzing the main-pole head field distribution and spacing effect between the main-pole and the back layer.2. A new continuous roll coater system of the perpendicular media by magnetron sputtering was constructed. The deposition rate of 1 <micro> m/min. and the through-put of 6m/hr. were accomplished by the system. The fabrication speed of 5 inches flexible disk is 100 times as high as that of the conventional batch system.3. Sputtering conditions such as impurity gases during sputtering and surface conditions of the organic base films were studied with respect to the medium quality. Finally, high quality media with large anisotropy and smooth surface could be realized even for the roll coater system. The fabricated double layer disk media showed 30dB overwrite and 45dB S/N ratio at 100kBPI, where the head medium spacing has been reduced below 500 <゜]A> .Finally, we can conclude that the initial research purposes are successfully completed, and fandamentals of massproduction of the perpendicular medium are established.

针对垂直记录介质的高速制备，研究了双层介质的设计准则、介质的高速连续溅射方法以及所制备介质的性能和性能。 1． Co-Cr垂直各向异性膜的记录层和软磁背层均经过实验设计，以表现出记录和再现的高灵敏度以及高密度响应。通过分析主极头场分布以及主极与背层间距效应，从理论上阐明了设计思路。 2．构建了一种新型磁控溅射垂直介质连续辊涂系统。沉积速率为1<微米>米/分钟。吞吐量为6m/hr。都是由系统完成的。 5英寸软盘的制作速度是传统批量系统的100倍。 3．针对介质质量，研究了溅射过程中的杂质气体等溅射条件以及有机基膜的表面条件。最后，即使对于辊涂机系统，也可以实现具有大各向异性和光滑表面的高质量介质。所制造的双层磁盘介质在100kBPI下表现出30dB的重写和45dB的信噪比，其中磁头介质间距已减小到500<゜]A>以下。最后，我们可以得出结论，初步的研究目的已经成功完成，并且建立了垂直介质批量生产的基础。