Study on the Accuracy of High Precise Rotary Encoders

提出了一种高精度旋转编码器的标定方法，并对标定误差进行了讨论。利用该方法对几种高精度旋转编码器进行了标定，验证了编码器的精度。以下是对研究结果的总结。(1)提出了等分平均法作为高精度标定方法。该方法采用高阶傅里叶分量误差小的旋转编码器，算法简单，标定工作简单，可实现高精度标定。(2)将该方法与前一种方法应用于该标定系统的主比例尺（磁比例尺）标定。结果表明，检测误差傅里叶分量的标定方法可用于标定旋转编码器，并证实了主刻度的精确定标值<±>0.7”。(3)将精确定标值的误差校正记录方法应用于主刻度的重新标定，得到了精度约为<±>0.2”的标度编码器，以下被清除。日本精度最高的光电式编码器精度<正负> .4"。世界上精度最高的光电式编码器，其精度<正负> 0.1"。磁式编码器的精度<正负> 0.3"。其中高精度电磁感应式（解析器）的精度为<正负bbbb8”，大部分周期性误差是由检测线圈的数量和励磁引起的

A new calibration method was proposed for high precise rotary encoders and the calibration error were discussed. Using this method, the calibration of some kinds of the highest precise rotary encoders have been done and the accuracy of these encoders have been cleared.The Followings are the Summary of Research Results.(1) The same dividing average method was proposed as a high precise calibration method. Using a rotary encoder of which high order fourier components of the error are small, the high precise calibration can be done with simple algorithm and easy calibration work by this method.(2) The method and the former method were applied to the calibration of the masterscale (magnetic scale) of this calibration system. The results were that the calibration methods which detect fourier components of the error were useful to calibrate rotary encoders and the accurate calibration value <plus-minus>0.7" of the masterscale was confirme(3) The error correction recording method referred to the accurate calibration value was applied to rerecording of the masterscale and the scale with the accuracy of about <plus-minus>0.2" has been mad(4) As the results of the calibration of some kinds of the highest precise rotary encoders, the followings were cleared. The accuracy of the photo-electric type encoder which is the highest precise one in Japan is <plus-minus>0.4". The accuracy of the photo-electric type encoder which is the highest precise one in the world is <plus-minus> 0.1". The accuracy of the magnetic type encoder is <plus-minus> 0.3". One of high precise electromagnetic induction type (resolver) is the accuracy of <plus-minus> 8" and the most part of the most part of the periodic error caused by the number of the detecting coil and the exciti