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Crystallography of Thin Metal Film Deposited onto Planar and Spherical Metal Substrates

沉积在平面和球形金属基底上的金属薄膜的晶体学

基本信息

批准号：
63550473
负责人：
KATO Masaharu
金额：
$ 1.34万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1988
资助国家：
日本
起止时间：
1988 至 1989
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-63550473/
关键词：
Thin film Deposition Crystallography Epitaxy Interface FIM 真空蒸着エピタキシャル方位関係

项目摘要

During the two-year period of this project, the following achievements have been made.1. A new deposition apparatus with better vacuum has been constructed using the equipment budgets of this Grant-in-Aid.2. Copper and iron were chosen, one as a deposit crystal and the other as a substrate crystal. (1) Familiar orientation relationships, such as the Kurdjumov-Sachs (K-S) relationship, were found between deposit and substrate crystals when low-index substrate planes were used. On the other hand, several new orientation relationships were found to exist on some higher-index substrate planes. (2) Iron deposited on copper as thin film layers with domain structure. However, copper deposited on iron as many fine islands.3. Iron was deposited on an [001]-oriented needle-like specimen of copper. The semi-spherical tip of the specimen was examined on a field-ion microscope (FIM). It has been found that four separate regions of iron film exist around the [001] pole and each region shows the K-S relationship to the copper substrate.4. In the light of the experimental results, the following three factors have been identified critical in determining epitaxial relationships on given substrate orientations: (1) the Bain correspondence between the two crystals, (2) the good matching of the two crystals at the interface, and (3) minimization of misfit strain energy.5. Using the infinitesimal-deformation approach, the crystallography of martensites or precipitates in a bulk material has also been discussed theoretically.

在这个项目的两年期间，取得了以下成果。利用本补助金的设备预算，建造了一台真空度更好的新沉积设备。选择铜和铁，一种作为存款晶体，另一种作为衬底晶体。(1)当使用低折射率衬底平面时，在存款和衬底晶体之间发现了熟悉的取向关系，例如Kurdjumov-Sachs（K-S）关系。另一方面，发现了一些新的取向关系存在于一些高折射率衬底平面。(2)铁沉积在铜上作为具有畴结构的薄膜层。然而，铜沉积在铁上的细岛很多。3.铁沉积在[001]取向的针状铜样品上。在场离子显微镜（SEM）上检查了样品的半球形尖端。研究发现，在[001]极周围存在四个分离的铁膜区域，每个区域与铜衬底之间均呈现K-S关系.根据实验结果，已确定以下三个因素对于确定给定衬底取向上的外延关系至关重要：（1）两个晶体之间的贝恩对应关系，（2）两个晶体在界面处的良好匹配，以及（3）最小化失配应变能。5.利用无限小变形的方法，在理论上讨论了块状材料中马氏体或沉淀物的晶体学。