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Investigation of Photochemical Vapor Deposition by Using Vacuum Ultraviolet Light

利用真空紫外光进行光化学气相沉积的研究

基本信息

批准号：
01550256
负责人：
NAGAOKA Shin-ichi
金额：
$ 1.6万
依托单位：
Ehime University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1989
资助国家：
日本
起止时间：
1989 至 1990
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-01550256/
关键词：
Photochemical Vapor Deposition Vacuum Ultraviolet Light Core Photoionization Dissociation Organometallic Molecule

项目摘要

Metal ions are produced efficiently and selectively following photoionization from the metal-core orbital by using vacuum ultraviolet light. The purpose of the present investigation is to find the optimum condition for the efficient and selective production of the metal ions and to develop an efficient way of phorochemeical vapor deposition in the processes of semiconductor production.1. In the present investigation, it is necessary to use focused monochromatic vacuum-ultraviolet light with strong intensity. For this purpose, optics between the light source and the monochromator is of importance. Accordingly, we newly prepared a mirror system with high reflection on the basis of non-Gauusian optics and installed it in the TEPSICO-II apparatus of the BL3B beam line of the UVSOR synchrotron radiation facility in the Institute for Molecular Science. In the mirror system, the light intensity increased extremely and the efficiency of the investigation was improved.2. The metal ions and monomethyl-metal ions are produced following (n-l) d core ionization in various organometallic molecules with methyl groups. This fragmentation pattern can be explained in terms of the hybrid orbitals.3. In various organometallic molecules with methyl groups, the C ls ionization is followed by KVV Auger process and the fragmentation proceeds by way of the doubly charged parent ion. The metal-core ionization is followed by a cascade of Auger events, and the fragmentation proceeds by way of the higher multiply charged parent ions. The fragmentation patterns changes significantly depending on the site of the core electrons excited.4. The relative yield of ion pairs with aluminum ion are enhanced around the Al : 2p core ionization threshold in trimethylaluminum.

使用真空紫外光从金属核轨道光电离后，可以有效且选择性地产生金属离子。本研究的目的是寻找高效、选择性生产金属离子的最佳条件，并开发半导体生产过程中磷化学气相沉积的有效方法。 1．在目前的研究中，需要使用强强度的聚焦单色真空紫外光。为此，光源和单色仪之间的光学器件非常重要。为此，我们新制备了一种基于非高斯光学的高反射镜系统，并将其安装在分子科学研究所UVSOR同步加速器辐射装置BL3B光束线的TEPSICO-II装置中。在镜面系统中，光强大大增加，提高了调查效率。 2．金属离子和单甲基金属离子是在具有甲基的各种有机金属分子中经过(n-1)d核电离后产生的。这种碎片模式可以用杂化轨道来解释。3．在各种带有甲基的有机金属分子中，Cl s 电离之后是 KVV 俄歇过程，并且通过带双电荷的母离子进行碎裂。金属核电离之后是一系列俄歇事件，并且碎片通过更高的多电荷母离子进行。碎片模式根据核心电子激发的位置而显着变化。4．在三甲基铝中，铝离子对离子对的相对产率在 Al:2p 核心电离阈值附近增强。