DEVELOPMENT OF A NOVEL HIGH-EFFICIENCY HIGH-BRIGHTNESS ULTRAVIOLET AND VACUUM-ULTRAVIOLET LIGHT SOURCE (EXCIMER FLASH LAMP)

新型高效高亮紫外真空紫外光源（准分子闪光灯）的研制

• 批准号: 62460137
• 负责人: OBARA Minoru
• 金额: $ 4.42万
• 依托单位: KEIO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1987
• 资助国家: 日本
• 起止时间: 1987 至 1988
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-62460137/
• 关键词: EXCIMER; MICROWAVE DISCHARGE; ULTRVIOLET LIGHT SOURCE; VACUUM ULTRVIOLET LIGHT SOURCE; パルス放電; マイクロ波放電

1. Operatinal regime of excimer flash lamp with a high intrinsic efficiency could be obtained numerically by a comprehensive excimer discharge kinetic code.2. Using a longitudinal discharge in a mixture of F_2/Kr^' He=0.1/7.5/92.4(%) at 75 Torr, a KrF fluorescence pulse (248nm) of up to 2.5usec was obatined. The fluorescence pulse was decreased with increasing F_2 donor concentration.3. Figh-repetition-rate operation of ArF and KrF excimer lamp pumped by a microwave discharge was achieved at up to 100 kHz.4. A quasi-continuous operation of ArF and KrF excimer lamp pumped by a microwave discharge was also achieved.5. With an ArF lamp (193nm) pumped by a pulse microwave dischrge at 55 kHz, the fluorescence output obtained was 31.5W with an intrinsic efficiency of 8.2%. With a quasi-continuous poeration, the ArF fluorescence output was 28.8W obtained with an intrinsic efficiency of 4.4%6. As for KrF lamps, an KrF fluorescence output of 43W was obtaained with an intrinsic efficiency of 12.5%, which was pumped by a high-repetion-rated microwave discharge (55kHz). An KrF fluorescence output was obtained at 56W with an efficiency of 8.3%, which was pumped by a quasi-cw microwave discharge.

1.利用一套完整的准分子放电动力学程序，可以数值模拟得到具有高本征效率的准分子闪光灯的工作状态.在F_2/Kr ~（2-）/He=0.1/7.5/92.4（%）的混合气体中，在75乇的纵向放电条件下，获得了高达2.5微秒的KrF荧光脉冲（248 nm）。荧光脉冲随F_2供体浓度的增加而减小.微波放电泵浦的ArF和KrF准分子灯在高达100 kHz的频率下实现了高重复频率工作.并实现了微波放电泵浦ArF和KrF准分子灯的准连续工作.用55 kHz脉冲微波放电泵浦193 nm的ArF灯，获得31.5W的荧光输出，本征效率为8.2%。在准连续工作条件下，获得了28.8W的ArF荧光输出，本征效率为4.4%6。对于KrF灯，在高重复频率微波放电（55 kHz）泵浦下，获得了43 W的KrF荧光输出，本征效率为12.5%。在准连续微波放电泵浦下，获得了56 W的KrF荧光输出，效率为8.3%。

项目成果

KUMAGAI,HIROSHI: "A NEW HIGH-EFFICIENCY QUASI-CONTINUOUS OPERATION OF A KrF(B 【.scharw】X) EXCIMER LAMP EXCITED BY MICROWAVE DISCHARGE" APPLIED PHYSICS LETTERS. (1989)

Kumagai, HIROSHI：“微波放电激发 KrF(B [.scharw]X) 准连续操作的新型准连续操作”应用物理学快报 (1989)。

Kumagai Hiroshi: Conference Record of IEEE International Conference on Plasma Science. 113 (1987)

Kumagai Hiroshi：IEEE国际等离子体科学会议记录。

Obara Minoru.: Applied Physics Letters. (1989)

小原稔：应用物理快报。

Kumagai Hiroshi: Journal Applied physics. (1989)

熊谷宏：应用物理学杂志。

KUMAGAI,HIROSHI: "A HIGH-EFFICIENCY OPERATION OF A MICROWAVE DISCHARGE-PUMPED ArF(B 【.scharw】 X) EXCIMER LAMP" JOURNAL OF APPLIED PHYSICS. (1989)

Kumagai, HIROSHI：“微波放电泵 ArF(B [.scharw] X) 准分子灯的高效操作”应用物理学杂志 (1989)。