DEVELOPMENT OF A NOVEL HIGH-EFFICIENCY HIGH-BRIGHTNESS ULTRAVIOLET AND VACUUM-ULTRAVIOLET LIGHT SOURCE (EXCIMER FLASH LAMP)

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1. Operatinal regime of excimer flash lamp with a high intrinsic efficiency could be obtained numerically by a comprehensive excimer discharge kinetic code.2. Using a longitudinal discharge in a mixture of F_2/Kr^' He=0.1/7.5/92.4(%) at 75 Torr, a KrF fluorescence pulse (248nm) of up to 2.5usec was obatined. The fluorescence pulse was decreased with increasing F_2 donor concentration.3. Figh-repetition-rate operation of ArF and KrF excimer lamp pumped by a microwave discharge was achieved at up to 100 kHz.4. A quasi-continuous operation of ArF and KrF excimer lamp pumped by a microwave discharge was also achieved.5. With an ArF lamp (193nm) pumped by a pulse microwave dischrge at 55 kHz, the fluorescence output obtained was 31.5W with an intrinsic efficiency of 8.2%. With a quasi-continuous poeration, the ArF fluorescence output was 28.8W obtained with an intrinsic efficiency of 4.4%6. As for KrF lamps, an KrF fluorescence output of 43W was obtaained with an intrinsic efficiency of 12.5%, which was pumped by a high-repetion-rated microwave discharge (55kHz). An KrF fluorescence output was obtained at 56W with an efficiency of 8.3%, which was pumped by a quasi-cw microwave discharge.