STUDY ON TRAVELING MICROMECHANISM

在本研究中，我们尝试制作了最应具有微机构各种特性的移动微机构，并解决或清除了加工过程中出现的问题。(1)设计基础：考察自然和人工物体的运动速度，发现一些自然规律。研究了平面副与径向轴和轴承副之间的摩擦系数，消除了尺寸小于0.1mm时突然增大的现象。从微机构零件的制造精度出发，分析了微机构的最小尺寸。(2)行走机构：在观察昆虫后，利用水的表面张力在天花板和墙壁上创造行走机构。清除了软表面微机构的特殊特征。(3)致动器：以吸水型聚合物凝胶为致动器，建立了致动器的电流变形基本方程，并试制了人工暖凝胶电机。(4)供能：研究了利用电磁波、太阳能电池、超声波等提供能量的方法。采用环向能法，建立了压裂压力驱动下的管内球囊模型并进行了试验，对利用布朗运动能进行了基础研究。(5)小量力的测量：利用双olph压电薄膜的振动阻抗变化进行了研究，得到了10-6[N]的灵敏度，现拟应用于蚂蚁的功率测量。

In this study, traveling micromechanisms which should have the most kinds of special features of a micromechanism were trially made and the problems in the process were solved or cleared. (1)Basics of design: Investigating the traveling speeds of natural and artificial traveling things,some natural laws were found out. About the frictional coefficients between flat surfaces pair and radial shaft and bearing pair were investigated and sudden increase at the size below 0.1mm was cleared. The minimum size of the micro mechanisms were analized from the manufacturing accuracy of their parts. (2)Traveling mechanisms : The traveling mechanisms on the ceiling and wall using the surface tension of water were created after the observation of insect. The special feature of the micromechanism on the soft surfaces were cleared. (3)Actuator : For using the water absorptive polymer gel as the actuator, the fundamental equation of the deformation due to electric current was induced and the artificial warm and gel motor were trially made. (4)Supplying energy : Some methods using the electro-magnetic wave, the solar battery, the ultrasonic wave and etc. were investigated. As the method using the circumferantial energy, the balloon model for inside of tube driven by fractuating pressure was made and tested and fundamental study of utilizing the Brown motion energy was done. (5)Measurement of small amount force : Using the vibration impedance change of bimolph piezo-film was investigated and the sensitivity of 10-6[N] was obtained and the method are going to apply to the power measurement of ant now.