Development of Supersonic Ion-Beam Apparatus and its Application to Low-Energy Ion-Molecule Reactions

超声离子束装置的研制及其在低能离子分子反应中的应用

• 批准号: 02555170
• 负责人: TSUJI Masaharu
• 金额: $ 3.26万
• 依托单位: KYUSHU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02555170/
• 关键词: Supersonic Ion-Beam; Ion-Molecule Reactions; Etching; Mass Spectroscopy; 超音速イオンビ-ム; イオン-分子反応; 発光スペクトル

A new type of supersonic ion-beam apparatus has been developed and applied to low-energy ion-molecule reactions of plasma processing gases. Rate constants and product ion distributions have been determined by using mass spectroscopy, whereas reaction dynamics has been clarified by using emission spectroscopy. Thermal ion-molecule reactions of Ar^+ with halogenated methanes and simple aliphatic hydrocarbons were investigated systematically. It was demonstrated that product ion distributions reported by using a selected ion flow tube method have often deviated from the initially distributions due to high operating pressures. Most of all charge-reactions were found to proceed through near-resonant processes, being independent of the magnitude of Franck-Condon factors for ionization. On the basis of emission spectroscopic studies, it was found that the formation rate constants of excited states occupy below 5% of the total reaction rate constant.Ion-molecule reaction of CO_2^+ with chloromethanes have been studied in order to examine the different reactivity between atomic ions and molecular ions. Not only near-resonant charge-transfer but also non -resonant one occurs in the CO_2^+ reactions due to a larger degrees of freedom in the products. The supersonic ion-beam apparatus has successfully applied to reactions of simple cluster ions with hydrocarbons. The total reaction rate constants of Ar_2^+,ArN_2^+,and N_4^+ with hydrocarbons have been determined. The product ion distributions led us to conclude that the reactivity of ArN_2^+ is similar to that of Ar_2^+. Since a high density of reactive halogen atoms can be generated by using the present ion-beam apparatus, it will be very useful for the reactive etching of a wafer.

研制了一种新型超音速离子束装置，并将其应用于等离子体处理气体的低能离子-分子反应。用质谱仪测定了反应速率常数和产物离子分布，用发射光谱分析了反应动力学。系统地研究了Ar~+与卤代甲烷和简单脂肪族碳氢化合物的热离子-分子反应。结果表明，由于操作压力较高，用选择离子流管法测定的产物离子分布往往与初始分布有偏差。大多数电荷反应都是通过近共振过程进行的，与电离的弗兰克-康登因子的大小无关。在发射光谱研究的基础上，发现激发态的形成速率常数占总反应速率常数的5%以下。为了考察原子离子和分子离子之间的不同反应活性，研究了CO_2~(2+)与氯甲烷的离子-分子反应。在CO_2~+反应中，由于产物的自由度较大，不仅发生了近共振电荷转移，也发生了非共振电荷转移。超音速离子束装置已成功地应用于简单团簇离子与碳氢化合物的反应。测定了Ar_2^+、ArN_2^+和N_4^+与碳氢化合物的总反应速率常数。产物离子分布表明，ArN_2^+的反应活性与Ar_2^+相似。由于目前的离子束装置可以产生高密度的反应卤素原子，因此对于反应刻蚀晶片将是非常有用的。

项目成果

辻 正治: "Dissociative Charge-Transfer Reactions of Ar^+ with CF_nCl_<4-n> at Thermal Enrgy" Journal of Chemical Physics. 96. 3649-3655 (1992)

Masaharu Tsuji：“热能中 Ar^+ 与 CF_nCl_<4-n> 的解离电荷转移反应”化学物理杂志 96. 3649-3655 (1992)。

辻 正治: "Dissociative Excitation of CF_4, Cl_4, and Chloromethanes by Collisions with Argon and Helium Active Species" Journal of Chemical Physics. 97. 245-255 (1992)

Masaharu Tsuji：“CF_4、Cl_4 和氯甲烷与氩和氦活性物质碰撞的解离激发”化学物理杂志 97. 245-255 (1992)。

M.Tsuji: "Dissociative Excitation and Ionization of GeH_4 by Collisions with Argon and Helium Active Species" J. Chem. Phys.93. 3133-3141 (1990)

M.Tsuji：“GeH_4 通过与氩和氦活性物质碰撞的解离激发和电离”J. Chem。

辻 正治: "Dissociative Charge-Transfer Reactions of Ar^+ with Chloromethanes at Thermal Energy" Chemical Physics Letters. 192. 362-367 (1992)

Masaharu Tsuji：“热能下 Ar^+ 与氯甲烷的解离电荷转移反应”化学物理快报 192. 362-367 (1992)。

M.Tsuji: "Dissociative Charge-Transfer Reactions of Ar^+ with CF_nCl_<4-n> at Thermal Energy" J. Chem. Phys.96. 3649-3655 (1992)

M.Tsuji：“Ar^ 与 CF_nCl_<4-n> 在热能下的解离电荷转移反应”J. Chem。