STUDY ON A TRIAL MANUFACTURE OF HIGHLY 3-DIMENSIONAL PROFILING SYSTEM BY USING FIBER-OPTIC INTERFEROMETER

本研究的目的是为了以极高的精度测量试样的表面形状，更重要的是为了改进所追求的光纤测量技术，改进利用光外差效应进行高精度多点光纤温度测量或物体高对比度三维测量的光纤测量技术。该表面粗糙度测量系统采用单模光纤耦合器组成干涉仪，采用机械扫描设备对试样进行三维移动，并通过数据信息处理机自动输出测量结果。它在垂直和水平方向上的分辨率分别为0.3nm和1mum，使我们的测量系统具有足够的稳定性，可以实际使用。此外，由于本研究追求的是适用光纤干涉的实用化，更多的是参考传感器的测量，因此，本研究特别致力于利用简单的迈克尔逊干涉仪、光学相位传感和同步检测系统实现超高灵敏度的表面轮廓测量系统的实用化。利用光纤，我们可以在光纤电路器件的基础上，利用谐振频率随温度变化而变化的光纤环路谐振器制成多点温度传感器。这种光学温度传感器被认为是一种非常实用的东西，因为传感器部分的结构非常简单和耐用，并且可以根据谐振器的长度等参数选择放置的位置。除此之外，正在考虑改进和开发利用光纤谐振器测量电压或声音的新型光纤传感器。正如我们所说和所做的，这项研究开发了一种新型的光纤传感器，超越了它的简单目的，因此它可以被认为是证实其有效性的原因。少

The purpose of this research is to measure the surface shape of a specimen with extremely high precision, and still more, to improve the fiber-optic measurement technology which is after still more, to improve the fiber-optic measurement technology which is after the higly precise multipoint fiber-optic temperature measurement or the highly contrastive 3-dimensional measurement of objects by using optical heterodyne effect.This surface roughness measuring system composes an interferometer by using the single mode optical fiber coupler, 3-dimensionally moves the sepcimen by employing mechanical scanning equipments, and automatically output's the result of the measurement by doing data information processing machines.It has the resolution of 0.3nm and 1mum for the vertical and horizontal direction respectively, which can make us get the measuring system having sufficient stability to be used practically. Besides, since this study pursues the practical use of applicable fiber-optic interf … More erence sensor measurements, it particularly aims to have the surface profiling measurement system with super high sensitivity practicallized by using simple Michelson interferometer, optical phase sensing and synchronized detection system.With the optical fiber, we can make multipoint temperature sensors which is on the basis of the optical fiber circuit device obtained by the fiber-optic loop resonators whose resonance frequency changes with the change of the temperature. This optical temperature sensor is considered as a highly practical thing since the structure of the sensor part is quite simple and endurable, and the place to be located is selectable according to the parameters such as the length of the resonator.Except these, plans for the improvement and development of new fiber-optic sensors to measure voltages or sounds by using optical fiber resonator are being taken into consideration.As we have said and done, this research has developed a new type of fiber-optic sensor beyond its simple purpose so that it could be considered as what confirmed its effectiveness. Less