STUDY ON A TRIAL MANUFACTURE OF HIGHLY 3-DIMENSIONAL PROFILING SYSTEM BY USING FIBER-OPTIC INTERFEROMETER

光纤干涉仪高维仿形系统试制研究

• 批准号: 03555078
• 负责人: FUJII Yoichi
• 金额: $ 5.06万
• 依托单位: UNIVERSITY OF TOKYO
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03555078/
• 关键词: Surface Roughness Measuring System; 3-dimensional Profiling System; Fiber-Optic Interferometer; Temperature Sensor; Fiber-Optic Loop Resonator; Michelson Interferometer; Optical Phase Sensing; Phase Contrast; 表面形状形測; 表面粗さ計測; 光ファイバ干渉センサ; 表面プロファイ

The purpose of this research is to measure the surface shape of a specimen with extremely high precision, and still more, to improve the fiber-optic measurement technology which is after still more, to improve the fiber-optic measurement technology which is after the higly precise multipoint fiber-optic temperature measurement or the highly contrastive 3-dimensional measurement of objects by using optical heterodyne effect.This surface roughness measuring system composes an interferometer by using the single mode optical fiber coupler, 3-dimensionally moves the sepcimen by employing mechanical scanning equipments, and automatically output's the result of the measurement by doing data information processing machines.It has the resolution of 0.3nm and 1mum for the vertical and horizontal direction respectively, which can make us get the measuring system having sufficient stability to be used practically. Besides, since this study pursues the practical use of applicable fiber-optic interf … More erence sensor measurements, it particularly aims to have the surface profiling measurement system with super high sensitivity practicallized by using simple Michelson interferometer, optical phase sensing and synchronized detection system.With the optical fiber, we can make multipoint temperature sensors which is on the basis of the optical fiber circuit device obtained by the fiber-optic loop resonators whose resonance frequency changes with the change of the temperature. This optical temperature sensor is considered as a highly practical thing since the structure of the sensor part is quite simple and endurable, and the place to be located is selectable according to the parameters such as the length of the resonator.Except these, plans for the improvement and development of new fiber-optic sensors to measure voltages or sounds by using optical fiber resonator are being taken into consideration.As we have said and done, this research has developed a new type of fiber-optic sensor beyond its simple purpose so that it could be considered as what confirmed its effectiveness. Less

本研究的目的是对试件的表面形状进行高精度的测量，同时也是对光纤测量技术的进一步完善。在高精度多点光纤测温或高对比度3-D光纤测温技术之后，利用光外差效应测量物体的尺寸，该表面粗糙度测量系统由单模光纤耦合器构成干涉仪，采用机械扫描设备对样品进行三维移动，并通过数据信息处理机自动输出测量结果，垂直和水平方向的分辨率分别为0.3nm和1 μ m，从而使我们得到具有足够稳定性的测量系统，以供实际使用。此外，由于本研究追求的是实用的光纤干涉仪的实际应用， ...更多信息 本发明涉及一种用于表面轮廓测量的光纤传感器，特别是利用简单的迈克尔逊干涉仪、光学相位传感和同步检测系统，实现超高灵敏度的表面轮廓测量系统。我们可以制作多点温度传感器，这是基于光纤获得的光纤电路器件，谐振频率随温度变化而变化的光学环谐振器。这种光学温度传感器被认为是非常实用的东西，因为传感器部分的结构非常简单和耐用，并且根据诸如谐振器长度的参数可以选择要放置的位置。除此之外，新纤维的改进和开发计划-通过使用光纤谐振器来测量电压或声音的光学传感器正在被考虑。正如我们已经说过和做过的，这项研究已经开发出一种新型的光纤传感器，超越了其简单的目的，因此可以认为它证实了其有效性。少

项目成果

Masao Ozaki: "CHARACTERISTICS OF DIFFERENTIAL HETERODYNE LASER MICROSCOPE" THE INTERNATIONAL CONFERENCE ON CONFOCAL MICROSCOPY & 3D IMAGE PROCESSING. P02. (1993)

Masao Ozaki：“差示外差激光显微镜的特点”国际共焦显微镜会议

Yoichi Fujii: "OPTIMUM TRANSMISSION OF SOLITON" International Soliton Symposium in Kyoto. (1992)

Yoichi Fujii：“孤子的最佳传输”京都国际孤子研讨会。

Yorgzhe.Jin,Hanzhang.Diug,Yoichi.Fujii: "First-order properties of radial gradient leuses with spherical ends" MOC'91 YOKOHAMA. 178-181 (1991)

Yorgzhe.Jin，Hanzhang.Diug，Yoichi.Fujii：“具有球形末端的径向梯度 leuses 的一阶特性”MOC91 YOKOHAMA。

藤井 陽一,尾崎 政男: "レ-ザ顕微鏡" オプトロニクス. 1. 159-163 (1992)

Yoichi Fujii，Masao Ozaki：“激光显微镜”光电学。 1. 159-163 (1992)

Y.Jin: "Highly Sensitive Fiber-Optic Profiling System" International Conference of Optical Fibre Sensors. 24. (1991)

Y.Jin：“高灵敏度光纤分析系统”光纤传感器国际会议。