Development and evaluation of optical-use MgO : LiNbO_3 single crystals by line-focus-beam acoustic microscopy

光学用MgO：LiNbO_3单晶的开发和线聚焦声学显微镜评价

• 批准号: 04555063
• 负责人: KUSHIBIKI Junichi
• 金额: $ 8.32万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04555063/
• 关键词: LFB acoustic microscopy; V (z) curve analysis; Quanititative Measurements; LSAW velocity; Electrical device materials; Opto-electronics materials; MgO : LiNbO_3; Evaluation technique; V(Z)曲線解析法; 定量計測法

Line-focus-beam (LFB) acoustic microscopy, with perfect directionality, is a very useful and unique method of quantitative material characterization by measuring the velocity of leaky surface acoustic waves (LSAWs), excited on the boundary between the specimen and the water coupling, through V (z) curve analysis. The system has been applied to material problems in the scientific and industrial fields of MgO deped LiNbO_3 crystals for estabishment of the crystal growh conditions and for evaluation of the device fabrication processes.1.The reliable LFB system with high accuracy in LSAW velocity of better than 0.01% over an entire scanning area of 100 mm X 100 mm has been established.2.Six MgO-doped LiNbO_3 crystals, specially grown with different MgO dopant concentrations ranging from 0 to 13 mol%, have been employed for velocity measurements. It has been shown for the first time that the velocities on the three basic crystal surfaces of X-, Y-, and Z-cut planes increase for all the surf … More aces and all the propagation directions monotonically as the dopant concentration increases, and the corresponding density decrease monotonically.3.The measured LSAW velocities have been compared with the measured chemical and physical properties, viz., chemical composition, density, lattice constant, refractive index, and Curie temperature. It has been shown that the LFB system has a much greater sensitivity and resolution in the determination of these properties than any other analytical methods.4.Measurements of LSAW velocity distribution have been carried out for substrates obtained from a MgO (5 mol%) : LiNbO_3 single crystal with 3-inch diameter and 80 mm long. LSAW velocity distributions with the largest difference of about 3m/s have been obtained successfully, which might reflect the changes of crystal growth conditions, such as the chemical composition of the melt and the rotating and pulling speeds, and the temperature distributions in the crucible and furnace.5.The system has been applied to characterization of a proton-exchnged layr fabricated on Z-cut MgO (5mol%) : LiNbO_3 substrate with a layr thickness of 0.5 mum. It has been demonstrated that the system has the capability to resolve the change of diffusion depth of 2 nm and the change of extraordinary refractive index of 5x10^<-4>. It has been suggested that this method should be adapted as a new analytical technique for development and evaluation of waveguide-type optical device fabrication processes and systems for the future mass production. Less

线聚焦束（LFB）声学显微镜具有良好的方向性，通过V（z）曲线分析，测量在试样和水耦合界面上激发的漏表面声波（LSAW）的速度，是一种非常有用和独特的定量材料表征方法。该系统已应用于掺MgO铌酸锂晶体的科学和工业领域的材料问题，用于晶体生长条件的建立和器件制造工艺的评价。1.建立了可靠的LFB系统，在100 mm × 100 mm的整个扫描面积上，LSAW速度的精度优于0.01%。2.六个掺MgO铌酸锂晶体，专门生长的不同MgO掺杂剂浓度范围从0到13摩尔%，已被用于速度测量。它已被证明是第一次，三个基本晶体表面上的速度的X-，Y-和Z-切割平面增加所有的表面 ...更多信息 随着掺杂浓度的增加，各向异性和各向异性的传播方向单调变化，相应的密度单调减小。3.将所测得的LSAW传播速度与所测得的化学和物理性质进行了比较，化学组成、密度、晶格常数、折射率和居里温度。结果表明，LFB系统在测量这些特性方面比其它分析方法具有更高的灵敏度和分辨率。4.对直径3英寸、长80 mm的MgO（5mol%）：LiNbO_3单晶基片进行了LSAW速度分布的测量。实验结果表明，该系统能较好地反映晶体生长条件的变化，如熔体的化学成分、旋转速度和提拉速度的变化，以及坩埚和坩埚内温度的变化。5.该系统已用于Z切MgO（5mol%）：层厚为0.5 μ m的LiNbO_3衬底。实验结果表明，该系统具有分辨2nm的扩散深度变化和5 × 10 ~ 4的非寻常折射率变化的能力<-4>。有人建议，这种方法应适应作为一种新的分析技术的开发和评估的波导型光学器件的制造工艺和系统，为未来的大规模生产。少

项目成果

J.Kushibiki: "Characterizaiton of 36ﾟ YX-LiTaO_3 Wafers by Line-Focus-Beam Acoustic Microscopy" IEEE Trans. UFFC. 42. 83-90 (1995)

J. Kushibiki：“通过线聚焦束声学显微镜表征 36ﾟ YX-LiTaO_3 晶圆” IEEE Trans 42. 83-90 (1995)

J.Kushibiki: "A Calibration method of the LFB acoustic microscope system using isotropic standard specimens" 1992 IEEE Ultrasonics Symp.Proc.719-722 (1992)

J.Kushibiki：“使用各向同性标准样本的 LFB 声学显微镜系统的校准方法”1992 IEEE Ultrasonics Symp.Proc.719-722 (1992)

J.Kushibiki: "Quanitative Evaluation of 36ﾟ YX-LiTaO_3 Wafers by LFB Acoustic Microscopy" Ultrasonics International 93 Conf.Proc.49-52 (1993)

J.Kushibiki：“通过 LFB 声学显微镜对 36ﾟ YX-LiTaO_3 晶圆进行定量评估”Ultrasonics International 93 Conf.Proc.49-52 (1993)

J.Kushibiki: "A calibration of the LFB acoustic microscope system using isotropic standard specimens" 1992 IEEE Ultrasonics Symp.Proc.(1992)

J.Kushibiki：“使用各向同性标准样本校准 LFB 声学显微镜系统”1992 IEEE Ultrasonics Symp.Proc.(1992)

J.Kushibiki: "Elastic Propertise of 5-mol% MgO Doped LiNbO_3 Crystals Measured by Line-Focus-Beam Acoustic Microscopy" Appl. Phys. Lett.61. 2164-2166 (1992)

J.Kushibiki:%20"Elastic%20Propertise%20of%205-mol%%20MgO%20Doped%20LiNbO_3%20Crystals%20Measured%20by%20Line-Focus-Beam%20Acoustic%20Microscopy"%20Appl.%20Phys.%20Lett.61