Fabrication and Evaluation of Superconducting Wire by rf Magnetron Sputtering

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Highly c-axis oriented Y _1Ba_2Cu_3O_<7-x> (YBaCuO) films have been fabricated on a highly oriented silver (Ag) films deposited on a single crystal mica sheet by an rf magnetron sputtering. The deposition condition of Ag on the mica sheet was investigated first, and it was found that the optimum condition to fabricate highly (111) oriented Ag films is substrate temperature ; 470 K,output power ; 40 W.According to the X ray pole-figure analysis, the Ag film was quasi-single crystal oriented to (111) .The deposition condition of YBaCuO on the oriented Ag film on the mica sheet was investigated next. The evaluation of the film was performed by measuring T_c by using magnetic susceptibility analyzer. T _cwas significantly influenced by an substrate temperature and O _2pressure. The T_c increased with the increasing of a substrate temperature, and was corresponded to an maximum at the substrate temperature of 920 K.The T_c also increased with the increasing of O_2 pressure, and was saturated at 6.4x10^<-3> Torr. The pole figure analysis leads to the conclusion that the YBaCuO film was highly c-axis oriented film, furthermore, the film was also oriented to a and b axs along three<110>directions of Ag{111}plane.