Development of micro optical polarization splitters having multi layr structure

叠层偏振分光镜是由具有高折射率和低折射率的透明材料的周期性叠层薄膜组成的超小型空间可移偏振器。它是光通信系统中构建功能完备的光器件的关键部件。在本报告中，我们讨论了波长分别为1.55 μ m和1.3 μ m的高性能LPS的制备技术。对于较长波长，我们成功地用射频溅射法沉积了厚度超过200 μ m的a- si: H/SiOx: H多层膜，具有较高的光学性能和机械稳定性，并获得了适用于光器件的低损耗LPS。在较短波长，我们制备了a-Si_<1-x>C_x/SiO_2多层膜，通过对衬底温度和气体流速等沉积条件的研究，获得了低损耗的LPS。将制备的LPS初步集成到可编程光连接的二维波导电路中，并对其基本操作进行了实验验证。我们还演示了集成到两个热膨胀芯（TEC）光纤阵列中的无透镜和无对准光隔离器。这证实了将功能器件集成到TEC光纤中的原理和实用性。

A laminated polarization splitter is an ultrasmall spatial walk-off polarizer composed of periodically laminated thin films of transparent materials with a high refractive index and a low index. It is a key component to build functional optical devices for optical communication systems. In this report, we discuss the fabrication techniques of LPS's for the wavelength of 1.55 mu m and 1.3 mu m, respectively, with high performance. For the longer wavelength, we successfully deposited a-Si : H/SiOx : H multilayrs by rf sputtering method with a thickness more than 200 mu m with high optical properties and mechanical stability, and obtained low loss LPS's applicable to optical devices. For the shorter wavelength, we fabricated a-Si_<1-x>C_x/SiO_2 multilayr deposited by plasma-enhanced CVD method and obtained low loss LPS due to the study on deposition conditions such as the substrate temperature and gas flow rate. The fabricated LPS was tentatively integrated into a 2D waveguide circuit for a programable optical connect and the fundamental operation is experimentally verified. We also demonstrated lens-free and alignment-free optical isolators integrated into an array of two thermally expanded core (TEC) fibers. This verifies and endorses the Principle and usefulness of integrating functional devices into TEC fibers.