Development of micro optical polarization splitters having multi layr structure

多层结构微光偏振分光器的研制

• 批准号: 06555011
• 负责人: KAWAKAMI Shojiro
• 金额: $ 7.81万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555011/
• 关键词: integrated optical device; polarization splitter; optical isolator; optical switch; multilayr; RF sputtering; plasma enhanced chemical vapor deposition; LPS; 偏波無依存アイソレータ; スパッタリング; プラズマ CVD

A laminated polarization splitter is an ultrasmall spatial walk-off polarizer composed of periodically laminated thin films of transparent materials with a high refractive index and a low index. It is a key component to build functional optical devices for optical communication systems. In this report, we discuss the fabrication techniques of LPS's for the wavelength of 1.55 mu m and 1.3 mu m, respectively, with high performance. For the longer wavelength, we successfully deposited a-Si : H/SiOx : H multilayrs by rf sputtering method with a thickness more than 200 mu m with high optical properties and mechanical stability, and obtained low loss LPS's applicable to optical devices. For the shorter wavelength, we fabricated a-Si_<1-x>C_x/SiO_2 multilayr deposited by plasma-enhanced CVD method and obtained low loss LPS due to the study on deposition conditions such as the substrate temperature and gas flow rate. The fabricated LPS was tentatively integrated into a 2D waveguide circuit for a programable optical connect and the fundamental operation is experimentally verified. We also demonstrated lens-free and alignment-free optical isolators integrated into an array of two thermally expanded core (TEC) fibers. This verifies and endorses the Principle and usefulness of integrating functional devices into TEC fibers.

叠层偏振分束器是由具有高折射率和低折射率的透明材料的周期性叠层薄膜组成的超小型空间走离偏振器。它是构建光通信系统功能光器件的关键部件。在这份报告中，我们讨论的LPS的制作技术的波长为1.55 μ m和1.3 μ m，分别与高性能。对于较长的波长，我们用射频溅射法成功地沉积了厚度超过200 μ m的a-Si：H/SiOx：H多层膜，具有高的光学性能和机械稳定性，并获得了适用于光学器件的低损耗LPS。对于短波长，我们<1-x>采用等离子体增强CVD法制备了a-Si_ C_x/SiO_2多层膜，通过对衬底温度、气体流量等沉积条件的研究，获得了低损耗的LPS。制作的LPS尝试性地集成到一个可编程光连接的2D波导电路中，并对基本操作进行了实验验证。我们还展示了集成到两根热膨胀芯（TEC）光纤阵列中的无透镜和无对准光学隔离器。这验证并认可了将功能器件集成到TEC光纤中的原理和实用性。

项目成果

川上彰二郎: "ヴァーティカルフォトニクスと光スイッチ・光制御" 光学. 24. 318-323 (1995)

Shojiro Kawakami：“垂直光子学、光开关和光控制”光学。 24. 318-323 (1995)

Kazuo Shiraishi: "Integration of in-line optical isolators" IEEE Transactions on Magnetics. 32. 4108-4112 (1996)

Kazuo Shiraishi：“内联光学隔离器的集成”IEEE 磁学汇刊。

Y.G.Lee: "Low loss laminated polarization splitters for the wavelength lower than 1.3μm prepared by plasma enhanced chemical vapor deposition" Thin Solid Films. (1996)

Y.G.Lee：“通过等离子体增强化学气相沉积制备的波长低于 1.3μm 的低损耗层压偏振分光器”薄固体薄膜（1996）。

Hiroki Takahashi: "Mechanisms of reduction of the internal stress in hydrogenated silicon oxide films prepared by Ar/H_2 sputtering" Thin Solid Films. 281-282. 348- (1996)

Hiroki Takahashi：“Ar/H_2 溅射制备的氢化硅氧化物薄膜中内应力的降低机制”固体薄膜。

Y.G.Lee: "Low loss laminated polarization splitters for the wave length longer than 1.3μm prepared by plasma enhanced chemical vapor deposition" Thin Solid Films. (1996)

Y.G.Lee：“通过等离子体增强化学气相沉积制备的波长大于 1.3μm 的低损耗层压偏振分光器”薄固体薄膜（1996）。