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BASIC RESEARCH OF DEVELOPING THIN FILM SENSOR

薄膜传感器开发的基础研究

基本信息

批准号：
06555050
负责人：
SOMEYA Tsuneo
金额：
$ 3.39万
依托单位：
MUSASHI INSTITUTE OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555050/
关键词：
THIN FILM PRESSURE SENSOR THIN FILM STRAIN SENSOR SPUTTERING MANGANIN NICKEL-CHROME-ALUMINIUM ALLOY GOLD-CHROME ALLOY INTERNAL COMBUSTION ENGINE OIL FILM PRESSURE ニッケルクムロアルミ金クムロ薄膜歪みセンサー軸受

项目摘要

1. Decreasing the effect of temperature change on the Manganin thin film pressure sensor output :The temperature effect on the sensor output could be decreaced by changing the composition of the Manganin from 83Cu-14Mn-3Ni to 87.4Cu-9.6Mn-3.0Ni (wt%). The sensitivity for temperature change of the pressure sensor was decreased from -76*10-6 (OMEGA/OMEGA) /ﾟC to -(6-25)*10-6 (OMEGA/OMEGA) /ﾟC.Therefore the pressure measurement error by the temperature change was decreased from -3.45 MPa/ﾟC to -(0.3-1.3) MPa/ﾟC.2. Decreasing the strain effect on the Manganin thin film pressrue sensor output :The two sensor patterns were developed to reduce the effect of strain. The sensor pattern were changed from straight line to phi1 circle which has a gap to connect lead film (which shape is like OMEGA) and to two half circle whose radius is 0.4, and it caused great decrease of gage rate. Then the error resulting from the strain explained in the following column 3 can be compensated more accurately.3. … More Development of the composition of thin film strain sensor :Strain sensor which has the sensitibity only for strain, but not for pressure and temperature was developed to compensate the error of the thin film pressure sensor resulting from strain. The strain sensor was made from 70.5Ni-18.5Cr-11.0Al.4. Development of the Au-Cr thin film pressure sensor :It was found that a Au-Cr thin film pressure sensor has a possibility to measure only pressure without the effect of strain and temperature. That sensor compositions are about 96.3Au-3.6Cr and 97Au-3Cr. The thickness of the sensor is 0.3mum (which was measured by From Tracer purchased in 1994).5. Clarification of the mechanism of a film defect on main bearing :In fabricating a sensor on a bearing, a film defect of lens shape appeared. It was made clear that the lens shape defect consist of Sn and Pb included in the bearing and it appeared when the bearing temperature became higher than 150ﾟC during spattering process. The bearing temperature during spattering process was measured by Fluorescence type fiber thermometer (1994).6. Main bearing oil film pressure of a diesel engine and gasoline engine were successfully measured by using the sensores described in 1,2 and 5 (with strain amplifier, 1994).7. Measurement of oil film pressure of piston-wrist pin :The oil film pressure between piston pin boss and wrist pin was successfully measured with thin film sensors which were made on the sliding surface on wrist pin. The insulation film and the protection film were changed from SiO2 to Al2O3 for improving the strength of film and the sensor life (which was measured by Continueous Load Type Surface Tester, 1995). In this measurement, sensor was made from Manganin, but lead film was made from Aluminum to improve the accuracy of measurement. Less

1.降低温度变化对锰铜薄膜压力传感器输出的影响：将锰铜的成分由83 Cu-14 Mn-3 Ni改为87.4Cu-9.6Mn-3.0Ni（wt%），可以降低温度对传感器输出的影响。该压力传感器对温度变化的灵敏度从-76 10 -6（OMEGA/OMEGA）/℃降低到-（6-25）*10-6（OMEGA/OMEGA）/℃，因此由温度变化引起的压力测量误差从-3.45 MPa/℃降低到-（0.3-1.3）MPa/℃.减小应变对锰铜薄膜压力传感器输出的影响：为了减小应变的影响，设计了两种传感器图形。传感器图形由直线变为φ 1圆（其形状类似于Ω），并有一个间隙连接铅膜，以及两个半径为0.4的半圆，这导致了测量速率的大幅下降。然后，可以更准确地补偿由下面第3栏中解释的应变引起的误差。 ...更多信息薄膜应变传感器组成的开发：为了补偿应变引起的薄膜压力传感器的误差，开发了只对应变敏感而对压力和温度不敏感的应变传感器。应变传感器由70.5Ni-18.5Cr-11.0Al制成。Au-Cr薄膜压力传感器的开发：发现Au-Cr薄膜压力传感器具有仅测量压力而不受应变和温度影响的可能性。该传感器的成分约为96.3Au-3.6Cr和97 Au-3Cr。传感器的厚度为0.3 μ m（由1994年购买的From Tracer测量）。主轴承上薄膜缺陷的机理阐明：在轴承上制造传感器时，出现了透镜形状的薄膜缺陷。结果表明，透镜形状缺陷是由轴承中的Sn和Pb组成的，在溅射过程中轴承温度高于150 ℃时出现。采用荧光型光纤温度计（1994）测量了溅镀过程中的轴承温度.利用1，2和5中介绍的传感器（带应变放大器，1994）成功地测量了柴油机和汽油机的主轴承油膜压力.活塞销油膜压力的测量：利用制作在活塞销滑动面上的薄膜传感器，成功地测量了活塞销凸台与活塞销之间的油膜压力。绝缘膜和保护膜从SiO2改为Al 2 O3，以提高膜的强度和传感器寿命（用连续负载型表面测试仪，1995年测量）。在本测量中，传感器由锰铜制成，但铅膜由铝制成，以提高测量精度。少