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Fabrication and properties of nitride field emitter.

氮化物场发射体的制备和性能。

基本信息

批准号：
06555086
负责人：
ADACHI Hiroshi
金额：
$ 1.34万
依托单位：
Muroran Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555086/
关键词：
Transition metal nitrides Fabrication of fine needle Field emission properties Stability of field emission current 遷移金属窒化物微小針の製作還移金属窒化物

项目摘要

Field emitters of NbN,Nb_2N,TiN,and ZrN were fabricated by nitriding elemental metal needles. The nitriding was carried out by heating metal needles in an ammonia gas.Before operating the field emitters, they are flash heated for several seconds. Their field emission properties changed with the increase of the flashing temperature. At the beginning the current fluctuation was fundamentally step-and spike-like. However, it changed to random-like when flashed higher than a certain temperature where field emission patterns changed.The NbN emitters, which had been flash heated at 900ﾟC,showed the most stable field emission current among the nitride emitters examined here.It is revealed by using of AES (Auger Electron Spectroscopy) that the field emission properties are largely affected by the concentric components at the emitter surface. Deficiency of nitrogen degrades the emission properties very much and occurred due to a flash heating higher than a temperature where the change of the emission pattern was observed.It is concluded that the nitride emitters gave stable emission when flash heated at a relatively low temperature, suggesting that the deficiency of nitrogen at the emitter surface does the important role in the stable operation.

采用氮化法制备了NbN、Nb_2N、TiN和ZrN的场致发射体。氮化是通过在氨气中加热金属针来进行的。在操作场发射器之前，它们被快速加热几秒钟。其场发射性能随闪速温度的升高而变化。开始时，电流波动基本上是阶梯状和尖峰状的。经过900 ℃快速加热的NbN发射体显示出最稳定的场发射电流，AES（Auger Electron Spectroscopy）分析表明，发射体表面的同心成分对发射体的场发射性能有很大的影响。氮的缺乏严重降低了发射性能，并且由于闪速加热高于观察到发射图案变化的温度而发生。得出的结论是，氮化物发射体在相对低的温度下闪速加热时给出稳定的发射，这表明发射体表面处的氮的缺乏在稳定操作中起重要作用。