Three-dimensional nanofabrication system for laser-driven micromachines

用于激光驱动微机械的三维纳米加工系统

• 批准号: 06555121
• 负责人: KAWATA Satoshi
• 金额: $ 10.18万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555121/
• 关键词: nanofabrication; evanescent wave; radiation force; micromachine; stereolithography; two-photon absorption; ケノ形成; FDTD

We tried to use the radiation force from the evanescent field, which is generated on the waveguide, for driving some kinds of micromachines.1) Analysis of the radiation force generated for micro-movers and design of micro-moversThe methods for calculating the radiation force were established by ourselves. Our methods base on boundary element method (BEM) and extended Mie's theory. The shape and refractive index of a micro-mover, which can transfer the energy of light to the kinetic energy of micro-mover efficiently, were examined by the methods. The calculation results showed that the efficiency of the energy transfer can be increased by using the resonance effect of light in case that the relative refractive-index of a micro-mover is greater than 1.5 approximately.2) Fabrication of a micro-mover with UV-cured resinWe developed a three-dimensional microfabrication technique in order to make some kinds of micro-movers. In the fabrication technique, a point in three-dimensional volume of UV-cured resin is photopolymerized through two-photon absorption process with a near-IR laser beam. A 3-D structure can be made by scanning the focused point of the near-IR laser beam. The resolution of our system have attained 1 mum nearly.3) Experiments on drive of micro-moversWe drove some kinds of micro-movers with the evanescent field generated on the channeled waveguide. The micro-movers we used are dielectric and metal particles whose diameter is 1-5mum. The light source we used is Nd : YLF laser whose oscillating wavelength is 1047mum. In the experiments, particles were trapped within the extent of the evanescent filed generated on the waveguide, and longitudinally ran along the waveguide. The velocity and the distance of the movement were near ten microins per second and over 1 cm, respectively.

我们尝试利用波导上产生的倏逝场的辐射力来驱动某些微机械。1)微动子辐射力分析及微动子设计自行建立了辐射力的计算方法。我们的方法基于边界元法（BEM）并扩展了米氏理论。通过该方法对能够有效地将光能转化为微动子动能的微动子的形状和折射率进行了研究。计算结果表明,当微动子的相对折射率大于1.5左右时,利用光的共振效应可以提高能量传递的效率。2)紫外固化树脂微动子的制作我们开发了一种三维微加工技术来制造某些类型的微动子。在制造技术中，紫外固化树脂的三维体积中的一个点通过近红外激光束的双光子吸收过程进行光聚合。可以通过扫描近红外激光束的聚焦点来制作 3D 结构。我们的系统的分辨率几乎达到了1μm。3）微动子驱动实验我们利用通道波导上产生的倏逝场来驱动一些类型的微动子。我们使用的微动元件是直径为1-5μm的电介质和金属颗粒。我们使用的光源是Nd:YLF激光器，其振荡波长为1047mum。在实验中，粒子被捕获在波导上产生的渐逝场的范围内，并沿着波导纵向运行。移动的速度和距离分别接近每秒十微英寸和超过一厘米。